Optical, structural and crystalline properties of GeSb2Te4thin films

[in Chinese]; [in Chinese]; [in Chinese]

Abstract

Phase change recording medium GeSb2Te4t hin film is prepared by RF-magnetron sputtering, Thermal annealing effects on the optical and structural properties of GeSb2Te4 thin films have been studied systematically. Thermal-inducedcrystalline property of amorphous GeSb2Te4 thin film has also been studied.