• Acta Optica Sinica
  • Vol. 30, Issue 5, 1473 (2010)
Chen Liuhua*, Lin Qiao, Li Shu, Ni Wei, and Wu Xingkun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos20103005.1473 Cite this Article Set citation alerts
    Chen Liuhua, Lin Qiao, Li Shu, Ni Wei, Wu Xingkun. Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation[J]. Acta Optica Sinica, 2010, 30(5): 1473 Copy Citation Text show less

    Abstract

    A novel optic accelerometer based on grating interference and phase generated carrier(PGC) modulation has been fabricated and tested. The reported prototype has sensitivity of above 4×10-5gn. Its dynamic range,which is relative with cantilevers of inertia system,is completely free from the limit of optical structure. In comparison with piezoelectricity and capacitive micro-electro-mechanical systems (MEMS) accelerometers,this device achieves an improvement both in resolution and dynamic range. Applying interference between ±1 refraction beams from a grating to acceleration sensing can also enhance stability and reduce the requirements on the installation of precision. The scheme proposed can also be applied to MEMS technique,which supplies a new thought for the design of high resolution and large dynamic range micro-opto-electromechanical systems (MOEMS) accelerometers.
    Chen Liuhua, Lin Qiao, Li Shu, Ni Wei, Wu Xingkun. Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation[J]. Acta Optica Sinica, 2010, 30(5): 1473
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