• Laser & Optoelectronics Progress
  • Vol. 54, Issue 4, 40005 (2017)
Jing Chenrui1、2、*, Wang Zhaohui2、3, and Cheng Ya2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/lop54.040005 Cite this Article Set citation alerts
    Jing Chenrui, Wang Zhaohui, Cheng Ya. Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2017, 54(4): 40005 Copy Citation Text show less

    Abstract

    The fundamental principle of spatiotemporal focusing technique of femtosecond laser is introduced in this paper, and applications of this technique on improving the resolution of femtosecond laser fabrication, suppressing the nonlinear effect of the fabricating process, and improving the materials fabrication quality are reviewed. Discussion is emphasized on the unique optical field characteristics of spatiotemporally focused femtosecond laser pulses including pulse front tilt (PFT) and intensity plane tilt, and their influence on material processing. Moreover, the applications of spatiotemporal focusing technique on high field physics and its scope of applications are introduced. Lastly, we summarize the principles and applications of spatiotemporal focusing technique, and suggest several directions for the future research.
    Jing Chenrui, Wang Zhaohui, Cheng Ya. Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2017, 54(4): 40005
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