Fang-hui LI, Zhong-wen HE, Wei CAO, Hong-yang ZHAO, Qiu-ming FU, Chuan-bo XU, Zhi-bin MA. Plasma Emission Spectroscopy Analysis of Two-Way Microwave Coupled Reaction Cavity[J]. Spectroscopy and Spectral Analysis, 2020, 40(11): 3613
- Spectroscopy and Spectral Analysis
- Vol. 40, Issue 11, 3613 (2020)
Fig. 1. Structure diagram of the reaction chamber
Fig. 2. Electric field distribution on the XZ plane in a quartz tube
(a): 80 mm; (b): 83 mm; (c): 86 mm; (d): 89 mm
(a): 80 mm; (b): 83 mm; (c): 86 mm; (d): 89 mm
Fig. 3. Electric field distribution on the YZ plane in a quartz tube
(a):L =53.2 mm, H =194 mm; (b): L =61.2 mm, H =194 mm;(c): L =61.2 mm, H =202 mm
(a):
Fig. 4. (a) Electric field isosurface simulation results in quartz tube at L =61.2 mm; (b) Influence of the distance of waveguides on Z -Axis plasma emission spectroscopy
Fig. 5. Plasma emission spectra of the reaction chambers with different gas pressures
(a): Along theZ axis; (b): Along the X and Y axes
(a): Along the
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