• Opto-Electronic Engineering
  • Vol. 51, Issue 8, 240089 (2024)
Chen Xie1,2,* and Tongyan Liu1
Author Affiliations
  • 1Ultrafast Laser Laboratory, College of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronic Information Science and Technology Ministry of Education, Tianjin University, Tianjin 300072, China
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    DOI: 10.12086/oee.2024.240089 Cite this Article
    Chen Xie, Tongyan Liu. Applications of vector vortex beams in laser micro-/nanomachining[J]. Opto-Electronic Engineering, 2024, 51(8): 240089 Copy Citation Text show less
    Vector vortex beams generation with vortex retarders (VR)[5]. (a) Setup; (b) Vector vortex beams of different orders
    Fig. 1. Vector vortex beams generation with vortex retarders (VR)[5]. (a) Setup; (b) Vector vortex beams of different orders
    Machining results on glass with tightly focused vortex beams. (a) Annular rings ablated by linearly polarized beams[16]; Polarization-sensitive structures produced on fused silica galss with (b) mixed and (c) radially- or azimuthally-polarized beams[17]
    Fig. 2. Machining results on glass with tightly focused vortex beams. (a) Annular rings ablated by linearly polarized beams[16]; Polarization-sensitive structures produced on fused silica galss with (b) mixed and (c) radially- or azimuthally-polarized beams[17]
    LIPSS imprinted on Silicon wafer with different vector vortex beams of various polarization state[21]. (a) Radial; (b) Azimuthal; (c) Spiral; (d) Linear. Insets (b1) and (b2) show the zoom-in LSFLs in the peripheral regions and the grooves in the internal region marked in (b)
    Fig. 3. LIPSS imprinted on Silicon wafer with different vector vortex beams of various polarization state[21]. (a) Radial; (b) Azimuthal; (c) Spiral; (d) Linear. Insets (b1) and (b2) show the zoom-in LSFLs in the peripheral regions and the grooves in the internal region marked in (b)
    Twisted nanoneedles on (a) Tantalum sheet[34] and (b) nanocones on Silicon surface[35]
    Fig. 4. Twisted nanoneedles on (a) Tantalum sheet[34] and (b) nanocones on Silicon surface[35]
    Machining results with ultrafast Bessel beams. (a) Nanochannels in glass[38]; (b) Waveguiding tubes fabricated by Bessel vortex beams[42] ;(c) Vector Bessel vortex beams;[43] (d) Nanorods by vector Bessel vortex beams[44]
    Fig. 5. Machining results with ultrafast Bessel beams. (a) Nanochannels in glass[38]; (b) Waveguiding tubes fabricated by Bessel vortex beams[42] ;(c) Vector Bessel vortex beams;[43] (d) Nanorods by vector Bessel vortex beams[44]
    (a) Schematics of 3D structurally polarized Bessel beams generation and twisted nanograting inscribing; (b) The SEM of inscribed microstructures[48]
    Fig. 6. (a) Schematics of 3D structurally polarized Bessel beams generation and twisted nanograting inscribing; (b) The SEM of inscribed microstructures[48]
    Twisted magnetization structures induced by vector Gaussian vortex beams [55]. (a) Schematic of magnetization generation at subdiffraction-limited scale; (b) Simulation of the light-induced twisted 3D magnetizations
    Fig. 7. Twisted magnetization structures induced by vector Gaussian vortex beams [55]. (a) Schematic of magnetization generation at subdiffraction-limited scale; (b) Simulation of the light-induced twisted 3D magnetizations
    Caustics of Bessel vortex beams in different theories. (a) Any hyperboloid formed by the rays emitting from a circle in the initial plane; (b) Ideal nondiffracting tubular caustics as deduced in Berry’s work[60] (red dashed line); (c) Expanding tubular caustics (blue lines) in reference [61]
    Fig. 8. Caustics of Bessel vortex beams in different theories. (a) Any hyperboloid formed by the rays emitting from a circle in the initial plane; (b) Ideal nondiffracting tubular caustics as deduced in Berry’s work[60] (red dashed line); (c) Expanding tubular caustics (blue lines) in reference [61]
    Globally analytical caustics of axially symmetric vortex beams[63]. (a) Vortex beams; (b) Bessel vortex beams; (c) Vortex beams generated from parabolic vortex toroidal lens
    Fig. 9. Globally analytical caustics of axially symmetric vortex beams[63]. (a) Vortex beams; (b) Bessel vortex beams; (c) Vortex beams generated from parabolic vortex toroidal lens
    Comparison of different light fields with and without vortices [63]. (a) and (b) Bessel-like beams; (c) Abruptly autofocusing vortex beams. Column 1 and 2 represent, respectively, the intensity profiles along propagation in simulations and in the experiments; Column 3 illustrates the differences between the global caustics of the abruptly autofocusing vortex beams with and without the OAM
    Fig. 10. Comparison of different light fields with and without vortices [63]. (a) and (b) Bessel-like beams; (c) Abruptly autofocusing vortex beams. Column 1 and 2 represent, respectively, the intensity profiles along propagation in simulations and in the experiments; Column 3 illustrates the differences between the global caustics of the abruptly autofocusing vortex beams with and without the OAM
    Vortex beams designed by solving the inverse problem[63]. (a) Quartic; (b) Logarithmic; (c) Parabolic; (d) Exponential tubular profiles
    Fig. 11. Vortex beams designed by solving the inverse problem[63]. (a) Quartic; (b) Logarithmic; (c) Parabolic; (d) Exponential tubular profiles
    Polymer microtubes fabricated with different vortex beam-based schemes. (a) Uniform tube size enabled by scanning the focused vortex beams[67]; (b) Controllable tube profiles by dynamic hologram-assisted axial scan of the focused vortex beams[69]; (c) Cylindrical micro-tubes fabricated by Bessel vortex beams[70]; (d) Bowl-shaped microstructures fabricated by abruptly autofocusing vortex beams with tailored parabolic caustics highlighted by the yellow rays[71]
    Fig. 12. Polymer microtubes fabricated with different vortex beam-based schemes. (a) Uniform tube size enabled by scanning the focused vortex beams[67]; (b) Controllable tube profiles by dynamic hologram-assisted axial scan of the focused vortex beams[69]; (c) Cylindrical micro-tubes fabricated by Bessel vortex beams[70]; (d) Bowl-shaped microstructures fabricated by abruptly autofocusing vortex beams with tailored parabolic caustics highlighted by the yellow rays[71]
    Schematics of the setup to generate arbitrary vector beams with a single liquid crystal spatial light modulator[72]
    Fig. 13. Schematics of the setup to generate arbitrary vector beams with a single liquid crystal spatial light modulator[72]
    (a) Patterns fabricated on LiNbO3 with vector beam arrays [75]; (b) Dynamically trajectory assisted fabrications of periodic nested microstructures; (c) Polygonal and spiral fan-leaf-like structures [76]; (d) Chinese character “Nan” and irregular quadrilateral grid structures [77]
    Fig. 14. (a) Patterns fabricated on LiNbO3 with vector beam arrays [75]; (b) Dynamically trajectory assisted fabrications of periodic nested microstructures; (c) Polygonal and spiral fan-leaf-like structures [76]; (d) Chinese character “Nan” and irregular quadrilateral grid structures [77]
    Multi-scaled micro/nano-structures fabricated on SiC surface with specially designed vector beams[78]. (a) Radial-hybrid vector beams; (b) Spiral-hybrid vector beams
    Fig. 15. Multi-scaled micro/nano-structures fabricated on SiC surface with specially designed vector beams[78]. (a) Radial-hybrid vector beams; (b) Spiral-hybrid vector beams