Chen Xie, Tongyan Liu. Applications of vector vortex beams in laser micro-/nanomachining[J]. Opto-Electronic Engineering, 2024, 51(8): 240089

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- Opto-Electronic Engineering
- Vol. 51, Issue 8, 240089 (2024)
![Vector vortex beams generation with vortex retarders (VR)[5]. (a) Setup; (b) Vector vortex beams of different orders](/richHtml/gdgc/2024/51/8/240089/7_240089-1.jpg)
Fig. 1. Vector vortex beams generation with vortex retarders (VR)[5]. (a) Setup; (b) Vector vortex beams of different orders
![Machining results on glass with tightly focused vortex beams. (a) Annular rings ablated by linearly polarized beams[16]; Polarization-sensitive structures produced on fused silica galss with (b) mixed and (c) radially- or azimuthally-polarized beams[17]](/richHtml/gdgc/2024/51/8/240089/7_240089-2.jpg)
Fig. 2. Machining results on glass with tightly focused vortex beams. (a) Annular rings ablated by linearly polarized beams[16]; Polarization-sensitive structures produced on fused silica galss with (b) mixed and (c) radially- or azimuthally-polarized beams[17]
![LIPSS imprinted on Silicon wafer with different vector vortex beams of various polarization state[21]. (a) Radial; (b) Azimuthal; (c) Spiral; (d) Linear. Insets (b1) and (b2) show the zoom-in LSFLs in the peripheral regions and the grooves in the internal region marked in (b)](/Images/icon/loading.gif)
Fig. 3. LIPSS imprinted on Silicon wafer with different vector vortex beams of various polarization state[21]. (a) Radial; (b) Azimuthal; (c) Spiral; (d) Linear. Insets (b1) and (b2) show the zoom-in LSFLs in the peripheral regions and the grooves in the internal region marked in (b)
![Twisted nanoneedles on (a) Tantalum sheet[34] and (b) nanocones on Silicon surface[35]](/Images/icon/loading.gif)
![Machining results with ultrafast Bessel beams. (a) Nanochannels in glass[38]; (b) Waveguiding tubes fabricated by Bessel vortex beams[42] ;(c) Vector Bessel vortex beams;[43] (d) Nanorods by vector Bessel vortex beams[44]](/Images/icon/loading.gif)
Fig. 5. Machining results with ultrafast Bessel beams. (a) Nanochannels in glass[38]; (b) Waveguiding tubes fabricated by Bessel vortex beams[42] ;(c) Vector Bessel vortex beams;[43] (d) Nanorods by vector Bessel vortex beams[44]
![(a) Schematics of 3D structurally polarized Bessel beams generation and twisted nanograting inscribing; (b) The SEM of inscribed microstructures[48]](/Images/icon/loading.gif)
Fig. 6. (a) Schematics of 3D structurally polarized Bessel beams generation and twisted nanograting inscribing; (b) The SEM of inscribed microstructures[48]
![Twisted magnetization structures induced by vector Gaussian vortex beams [55]. (a) Schematic of magnetization generation at subdiffraction-limited scale; (b) Simulation of the light-induced twisted 3D magnetizations](/Images/icon/loading.gif)
Fig. 7. Twisted magnetization structures induced by vector Gaussian vortex beams [55]. (a) Schematic of magnetization generation at subdiffraction-limited scale; (b) Simulation of the light-induced twisted 3D magnetizations
![Caustics of Bessel vortex beams in different theories. (a) Any hyperboloid formed by the rays emitting from a circle in the initial plane; (b) Ideal nondiffracting tubular caustics as deduced in Berry’s work[60] (red dashed line); (c) Expanding tubular caustics (blue lines) in reference [61]](/Images/icon/loading.gif)
Fig. 8. Caustics of Bessel vortex beams in different theories. (a) Any hyperboloid formed by the rays emitting from a circle in the initial plane; (b) Ideal nondiffracting tubular caustics as deduced in Berry’s work[60] (red dashed line); (c) Expanding tubular caustics (blue lines) in reference [61]
![Globally analytical caustics of axially symmetric vortex beams[63]. (a) Vortex beams; (b) Bessel vortex beams; (c) Vortex beams generated from parabolic vortex toroidal lens](/Images/icon/loading.gif)
Fig. 9. Globally analytical caustics of axially symmetric vortex beams[63]. (a) Vortex beams; (b) Bessel vortex beams; (c) Vortex beams generated from parabolic vortex toroidal lens
![Comparison of different light fields with and without vortices [63]. (a) and (b) Bessel-like beams; (c) Abruptly autofocusing vortex beams. Column 1 and 2 represent, respectively, the intensity profiles along propagation in simulations and in the experiments; Column 3 illustrates the differences between the global caustics of the abruptly autofocusing vortex beams with and without the OAM](/Images/icon/loading.gif)
Fig. 10. Comparison of different light fields with and without vortices [63]. (a) and (b) Bessel-like beams; (c) Abruptly autofocusing vortex beams. Column 1 and 2 represent, respectively, the intensity profiles along propagation in simulations and in the experiments; Column 3 illustrates the differences between the global caustics of the abruptly autofocusing vortex beams with and without the OAM
![Vortex beams designed by solving the inverse problem[63]. (a) Quartic; (b) Logarithmic; (c) Parabolic; (d) Exponential tubular profiles](/Images/icon/loading.gif)
Fig. 11. Vortex beams designed by solving the inverse problem[63]. (a) Quartic; (b) Logarithmic; (c) Parabolic; (d) Exponential tubular profiles
![Polymer microtubes fabricated with different vortex beam-based schemes. (a) Uniform tube size enabled by scanning the focused vortex beams[67]; (b) Controllable tube profiles by dynamic hologram-assisted axial scan of the focused vortex beams[69]; (c) Cylindrical micro-tubes fabricated by Bessel vortex beams[70]; (d) Bowl-shaped microstructures fabricated by abruptly autofocusing vortex beams with tailored parabolic caustics highlighted by the yellow rays[71]](/Images/icon/loading.gif)
Fig. 12. Polymer microtubes fabricated with different vortex beam-based schemes. (a) Uniform tube size enabled by scanning the focused vortex beams[67]; (b) Controllable tube profiles by dynamic hologram-assisted axial scan of the focused vortex beams[69]; (c) Cylindrical micro-tubes fabricated by Bessel vortex beams[70]; (d) Bowl-shaped microstructures fabricated by abruptly autofocusing vortex beams with tailored parabolic caustics highlighted by the yellow rays[71]
![Schematics of the setup to generate arbitrary vector beams with a single liquid crystal spatial light modulator[72]](/Images/icon/loading.gif)
Fig. 13. Schematics of the setup to generate arbitrary vector beams with a single liquid crystal spatial light modulator[72]
![(a) Patterns fabricated on LiNbO3 with vector beam arrays [75]; (b) Dynamically trajectory assisted fabrications of periodic nested microstructures; (c) Polygonal and spiral fan-leaf-like structures [76]; (d) Chinese character “Nan” and irregular quadrilateral grid structures [77]](/Images/icon/loading.gif)
Fig. 14. (a) Patterns fabricated on LiNbO3 with vector beam arrays [75]; (b) Dynamically trajectory assisted fabrications of periodic nested microstructures; (c) Polygonal and spiral fan-leaf-like structures [76]; (d) Chinese character “Nan” and irregular quadrilateral grid structures [77]
![Multi-scaled micro/nano-structures fabricated on SiC surface with specially designed vector beams[78]. (a) Radial-hybrid vector beams; (b) Spiral-hybrid vector beams](/Images/icon/loading.gif)
Fig. 15. Multi-scaled micro/nano-structures fabricated on SiC surface with specially designed vector beams[78]. (a) Radial-hybrid vector beams; (b) Spiral-hybrid vector beams

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