Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform

LIN Yongben; LI Yongtao; LI Chaobo; XIA Yang; WANG Minggang; CHEN Yan

doi:10.3969/j.issn.1003-501x.2013.02.015

Journals >Opto-Electronic Engineering >Volume 40 >Issue 2 >Page 93 > Article

Opto-Electronic Engineering
Vol. 40, Issue 2, 93 (2013)

Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform

LIN Yongben^1、2、*, LI Yongtao², LI Chaobo², XIA Yang², WANG Minggang², and CHEN Yan¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2013.02.015 Cite this Article

LIN Yongben, LI Yongtao, LI Chaobo, XIA Yang, WANG Minggang, CHEN Yan. Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform[J]. Opto-Electronic Engineering, 2013, 40(2): 93 Copy Citation Text

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References

[2] KISSINGER S, JEONG S M, YUN S H, et al. Enhancement in emission angle of the blue LED chip fabricated on lens patterned sapphire(0001) [J]. Solid-State Electronics(S0038-1101), 2010, 54(5): 509-515.

LIN Yongben, LI Yongtao, LI Chaobo, XIA Yang, WANG Minggang, CHEN Yan. Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform[J]. Opto-Electronic Engineering, 2013, 40(2): 93

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