A method of designing fully continuous phase plates (FCPP) for beam smoothing in inertial confinement fusion (ICF) has been studied. By using a local constraint function in Gerchberg-Saxton (G-S) algorithm’s iterative procedure, fully continuous phase plates free of 2π-line were obtained.The concave microlens arrays of 128×128 element are fabricated using a multiple-process including photolithography heat treatment, and ion beam etching. The typical structures of concave microlenses in quartz and silicon fabricated are concave sphere crown shape, concave cylinder, and square-top concave shape. The main characteristics, such as the matching behaviors of films coated on substrates in fabrication of concave cylinder photoresist microlens arrays, the structural parameter design of photoetching mask which is relevant to the fabrication of the microlens, and control basis of photoresist mask technological parameters, are analyzed respectively. The fabrication of plane refractive microlens arrays, for instance using the coating technique on the concave microlens plate, is discussed. The dimension and the surface micromorphology of the concave microlens array in quartz substrate are determined with scanning electron microscope and surface contourgraph. The far-field optical characteristics of concave microlens array in quartz substrate are given.