• Laser & Optoelectronics Progress
  • Vol. 61, Issue 6, 0618024 (2024)
Wanyun Ding1, Yuhang Wang2、*, Tao Zhang2, Hao Qin2, and Jixiang Wang2
Author Affiliations
  • 1College of Computing and Control Engineering, Northeast Forestry University, Harbin 150000, Heilongjiang, China
  • 2College of Mechanical Electrical Engineering, Northeast Forestry University, Harbin 150000, Heilongjiang, China
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    DOI: 10.3788/LOP240611 Cite this Article Set citation alerts
    Wanyun Ding, Yuhang Wang, Tao Zhang, Hao Qin, Jixiang Wang. Advances in Chromatic Confocal Microscopy[J]. Laser & Optoelectronics Progress, 2024, 61(6): 0618024 Copy Citation Text show less

    Abstract

    Chromatic confocal microscopy (CCM) combines the high spatial resolution of confocal microscope and the high wavelength resolution of spectral analysis. By virtue of the high precision, strong applicability, and nondestructive detection, it is widely used in the fields of industrial production, biomedicine, semiconductor chips, and other fields. This paper first introduces the principle of point chromatic confocal system and points out its drawback of low detection efficiency. Second, for improving the key performance indexes of chromatic confocal microscopy, the main achievements made in light source, dispersive objective lens, and spectral signal detection are described, and qualitative comparisons are made between various types of light sources. Subsequently, the scanning methods of chromatic confocal microscopy are demonstrated, the relevant research progress is sorted out, and the advantages and disadvantages of the relevant methods are summarized. Finally, the future developments of chromatic confocal microscopy are also prospected.
    Wanyun Ding, Yuhang Wang, Tao Zhang, Hao Qin, Jixiang Wang. Advances in Chromatic Confocal Microscopy[J]. Laser & Optoelectronics Progress, 2024, 61(6): 0618024
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