Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis

Bing Li; Yao Che; Hui Xu; Zhigang Zhang; Hong Zhou

doi:10.3788/LOP231551

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 23 >Page 2300004 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 23, 2300004 (2023)

Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis

Bing Li¹, Yao Che², Hui Xu¹, Zhigang Zhang¹, and Hong Zhou^3、4、*

Author Affiliations

¹Exchange & Development & Service Center of Science & Technology Talents of The Ministry of Science & Technology, Beijing 100045, China

²Institute of Scientific and Technical Information of China,Beijing 100038, China

³Wuhan Document and Information Center, Chinese Academy of Sciences, Wuhan 430071, Hubei, China

⁴Department of Information Resources Management, School of Economics and Management, University of Chinese Academy of Sciences, Beijing 100191, China

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DOI: 10.3788/LOP231551 Cite this Article Set citation alerts

Bing Li, Yao Che, Hui Xu, Zhigang Zhang, Hong Zhou. Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2300004 Copy Citation Text

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Article index updated: Jun. 17, 2024

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Bing Li, Yao Che, Hui Xu, Zhigang Zhang, Hong Zhou. Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2300004

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