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    Journals >Infrared and Laser Engineering >Volume 50 >Issue 2 >Page 20200199 > Article
    • Infrared and Laser Engineering
    • Vol. 50, Issue 2, 20200199 (2021)
    Study on infrared anti-reflection performance of diamond film with surface microstructure
    Zhaoyang Zhang1, Junjun Wei1, Zhongfu Xing1,2, Zhiyong Peng2..., Jinlong Liu1, Liangxian Chen1 and Chengming Li1|Show fewer author(s)
    Author Affiliations
  • 1Institute for Advanced Materials and Technology, University of Science and Technology, Beijing 100083, China
  • 2Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China
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    DOI: 10.3788/IRLA20200199 Cite this Article
    Zhaoyang Zhang, Junjun Wei, Zhongfu Xing, Zhiyong Peng, Jinlong Liu, Liangxian Chen, Chengming Li. Study on infrared anti-reflection performance of diamond film with surface microstructure[J]. Infrared and Laser Engineering, 2021, 50(2): 20200199 Copy Citation Text show less
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    Fig. 6. [in Chinese]
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    StepsGas flow of SF6/sccm Gas flow of C4F8/sccm HF Power/WICP Power/WTemperature/℃Pressure/mTorr(1 Torr=133.32 Pa)Time/s
    101001070020406
    210002570020307
    Table 1. [in Chinese]
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    Zhaoyang Zhang, Junjun Wei, Zhongfu Xing, Zhiyong Peng, Jinlong Liu, Liangxian Chen, Chengming Li. Study on infrared anti-reflection performance of diamond film with surface microstructure[J]. Infrared and Laser Engineering, 2021, 50(2): 20200199
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