Yishuai HAN, Tianyu SUN, Huimin JIA, Jilong TANG, Dan FANG, Dengkui WANG, Xiaohua WANG, Baoshun ZHANG, Zhipeng WEI. Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator[J]. Acta Photonica Sinica, 2021, 50(5): 86