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    Journals >Acta Optica Sinica >Volume 30 >Issue 2 >Page 602 > Article
    • Acta Optica Sinica
    • Vol. 30, Issue 2, 602 (2010)
    Effects of Substrate Materials and Deposition Parameters on Film Stress
    [in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    DOI: 10.3788/aos20103002.0602 Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of Substrate Materials and Deposition Parameters on Film Stress[J]. Acta Optica Sinica, 2010, 30(2): 602 Copy Citation Text show less
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of Substrate Materials and Deposition Parameters on Film Stress[J]. Acta Optica Sinica, 2010, 30(2): 602
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