• Chinese Journal of Lasers
  • Vol. 36, Issue 11, 3064 (2009)
Yang Wei1,*, Peng Xinhan2, and Zhang Jun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl20093611.3064 Cite this Article Set citation alerts
    Yang Wei, Peng Xinhan, Zhang Jun. Study of Laser Cutting Technology for Silicon Wafer under Water[J]. Chinese Journal of Lasers, 2009, 36(11): 3064 Copy Citation Text show less
    References

    [1] Reinhart Poprawe.Lasertechnik für die Fertigung:Grundlagen,Perspektiven und Beispiele für den Innovativen Lngenieur[M]. Zhang Dongyun Transl.,Beijing:Tsinghua University Press,2008. 279-283

    [2] Lou Qihong,Zhang Lin,Ye Zhenhuan et al.. Experimental research on Si cutting by using UV excimer laser[J]. Laser Technol.,2002,26(4):250-251

    [3] Ling Lei,Lou Qihong,Li Shuzhi et al.. Microcutting Si wafer in water bath by second harmonic output of YAG laser[J]. Laser Technol.,2004,28(2):131-134

    [4] Zhu Bo,Qi Litao,Wang Yang. The experimental study of water-assisted laser machining[J]. Modern Manufacturing Engineering,2003,(12):73-74

    [5] Long Yuhong,Xiong Liangcai,Shi Tielin. Experimental research of micromachining silicon by excimer laser ablation in air and under water[J]. Laser Technol.,2006,30(6):567-569

    [6] Zhang Hua,Xu Jiawen,Wang Jiming. Experimental study of neutral salt solution assisted laser machining [J]. Chinese J. Lasers,2008,35(11):1836-1840

    [7] Zhou Bingkun,Gao Yizhi,Chen Tirong et al.. Laser Principle[M].Beijing:National Defense Industry Press,2004. 64-73

    [8] Liao Jianhong,Meng Hongyun,Wang Hongwei et al.. Investigation and applications of fiber laser precision cutting system [J]. Chinese J. Lasers,2007,34(1):135-138

    [9] Li Jianmin,Yang Fu,Wei Jianyu et al.. Far-field interferometric analysis and application of bubble[J]. Acta Optica Sinica,2007,27(7):1301-1304

    [10] Li Wei,Yang Kecheng,Xia Min et al.. Distribution characteristics of scattered light intensity on coated air bubble in water[J]. Acta Optica Sinica,2008,28(4):799-803

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