Huaikun Wei, Shuhu Huan, Ying Liu, Huoyao Chen, Keqiang Qiu, Zhengkun Liu, Yilin Hong. Stitching Measurement of Line Density of Variable-Line-Spacing Gratings with Long Trace Profiler[J]. Acta Optica Sinica, 2023, 43(3): 0312007
- Acta Optica Sinica
- Vol. 43, Issue 3, 0312007 (2023)
Fig. 1. Detection of grating line density when the beam is incident at the grating Littrow angle
Fig. 2. Experimental grating diagram. (a) Physical diagram of variable pitch grating; (b) diagram of grating size and measurement position
Fig. 3. Flow chart for calculating line density
Fig. 4. Diagram of correspondence between the positions of adjacent segments
Fig. 5. Difference between two measurements of line density in 13 segments. (a) Calculated by line density splicing method;(b) calculated by slope splicing method
Fig. 6. Difference curves of line density measurements minus the corresponding line density fits in four sets of experiments
Fig. 7. Difference curves between different experimental groups
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Table 1. Coefficients of fitting equation corresponding to each group of line density measurements
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Table 2. Repeatability and smoothing of differences between 4 sets of line density measurements
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