• Opto-Electronic Engineering
  • Vol. 32, Issue 11, 20 (2005)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the preparation and properties of antireflective ITO thin films by magnetron sputtering[J]. Opto-Electronic Engineering, 2005, 32(11): 20 Copy Citation Text show less
    References

    [1] Tahar B H R, Ban T, Ohya Y. Tin doped indium oxide thin films: Electrical properties [J]. Appl. Phys,1998,83:2631.

    [2] John C C Fan. Preparation of Sn doped In2O3 (ITO) films at low deposition temperature by ion beam sputtering [J]. Appl. Phys. Lett,1979,34(8):515- 517.

    [3] Karasawa T, Miyata Y. Electrical and optical properties of indium tin oxide thin films deposited on unheated substrate by DC reactive sputtering [J]. Thin Solid Films,1993,223:135-139.

    [4] Danson N,Safi I,Hall G W,et al. Techniques for the sputtering of optimum indium tin oxide films on to room temperature substrates [J].Surf. Coat. Technol,1998,99:147-160.

    [5] Zhang D H, Ma H L. Scattering mechanisms of charge carries in transparent conducting oxide films [J]. Appl. Phys,1996,A62:487-492.

    [6] Tadatsugu Minami,Yoshihiro Takeda,Shinzo Takata,et al. Preparation of transparent conducting In4Sn3O12 thin films by DC magnetron sputtering[J]. Thin solid films,1997,308-309:13-18.

    [7] Wu W F. Rf magnetron sputtering ITO films and ITO films with antireflective and hard coating [D]. Ph. D. thesis:National Chiao Tung University, Hsinchu,1994.

    [9] Bertran E,Corbella C,Vives M,et al. RF sputtering deposition of Ag/ITO coatings at room temperature [J]. Solid State Ionics, 2003,165:139-148.

    [11] Kim Daeil,Kim Steven. Effect of secondary ion beam energy and oxygen partial pressure on the structural, morphological and optical properties of ITO films prepared by DMIBD technique[J]. Surface and Coatings Technology,2002,154:204-208.

    [12] Kim Daeil, Kim Steven. Effect of ion beam energy on the electrical, optical, and structural properties of indium tin oxide thin films prepared by direct metal ion beam deposition technique [J]. Thin Solid Films,2002,408:218-222.

    [13] Drude P. Ann. Theory of Optics[J]. Phys, 1900,1: 566.

    [14] T.C. Gorjanc,D. Leong,C. Py, et al. Room temperature deposition of ITO using r.f. magnetron sputtering[J]. Thin Solid Films,2002,413:181-185.

    [15] Minami T,Kakumu T,Shimokawa K,et al. New transparent conducting ZnO-In2O3-SnO2 thin films prepared by magnetron sputtering [J]. Thin Solid Films,1998,317:318-321.

    CLP Journals

    [1] WANG Li-hua, WU Shi-bin, HOU Xi, KUANG Long, CAO Xue-dong. Measurement of Flat Wavefront by Sub-aperture Stitching Interferometry[J]. Opto-Electronic Engineering, 2009, 36(6): 126

    [2] Zhang Lei, Tian Chao, Liu Dong, Shi Tu, Yang Yongying, Shen Yibing. Non-Null Annular Subaperture Stitching Interferometry for Aspheric Test[J]. Acta Optica Sinica, 2014, 34(8): 812003

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the preparation and properties of antireflective ITO thin films by magnetron sputtering[J]. Opto-Electronic Engineering, 2005, 32(11): 20
    Download Citation