Recently, light wave band biochemical sensors of single molecule detection are common to be seen. However, because of the light wave’s nano-scale length, the devices of small size are difficult to process and have poor sensing repeatability. Therefore, we proposed a terahertz (Terahertz, THz) sensor chip constituted of simple sub-wavelength metal block arrays. In theory, we established its sensing model based on Fabry-Perot (FP) resonance, combined with the analysis of the influence of the localized surface plasmon resonance of sub-wavelength metal structure of sensitivity in the Finite Element Method (FEM). Based on this, a large area and homogeneous structure was fabricated with the orthogonal lithography. The experimental result indicates that the resonance frequency shift 53 GHz for 0.025 mol/L D(+)-Glucose solution, which possess high sensitivity. Our works can provide theoretical guidance for the design of high sensitive terahertz sensor.