• Acta Optica Sinica
  • Vol. 15, Issue 6, 824 (1995)
[in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Float Polishing Subnanometer-Smooth Surface[J]. Acta Optica Sinica, 1995, 15(6): 824 Copy Citation Text show less

    Abstract

    This paper is a summary about our current work on supersmooth surface by float polishing. The basic configuration of a prototype machine is described, and some parameters for polishing subnanometer-smooth surface are presented with the recent measurement results of surface roughness.