Optimization of Lumped Parameter Model for Coupled MEMS Microwave Power Sensors

ZUO Wen; ZHANG Congchun; XIE Jiacheng; WANG Debo

doi:10.13911/j.cnki.1004-3365.200197

[1] SONG X, LI J, FAN Y, et al. Six-port direct modulator with carrier suppression technology for high-speed high-frequency wireless communications ［J］. IEEE Microw Wirel Compon Lett, 2017, 27(8): 745-747.

[2] ZHANG F, PAN S. Microwave photonic signal generation for radar applications ［C］ ∥ IEEE iWEM. Nanjing, China. 2016: 1-3.

[3] NAKARMI B, CHEN H, WON Y H, et al. Microwave frequency generation, switching, and controlling using single-mode FP-LDs ［J］. J Lightwave Technol, 2018, 36(19): 4273-4281.

[4] SINGHVI A, BOYLE K C, FALLAHPOUR M, et al. A microwave-induced thermoacoustic imaging system with non-contact ultrasound detection ［J］. IEEE Trans Ultrason Ferroelectr Freq Control, 2019, 66(10): 1587-1599.

[6] HAN L, HUANG Q, LIAO X, et al. A microwave power sensor based on GaAs MMIC technology ［J］. J Micromech Microeng, 2007, 17(10): 2132-2137.

[7] HAN L, HUANG Q, LIAO X, et al. A micromachined inline-type wideband microwave power sensor based on GaAs MMIC technology ［J］. J Microelectromech Syst, 2009, 18(3): 705-714.

[8] ZHANG Z, LIAO X. Microwave performance and sensitivity solutions for an inline coupling RF MEMS power sensor packaging ［C］ ∥ ICEPT. Xi'an, China. 2010: 730-732.

[9] ZHANG Z, LIAO X. A lumped model with phase analysis for inline RF MEMS power sensor applications ［J］. Sens Actuators A Phys, 2013, 194: 204-211.

[10] YI Z, LIAO X, ZHANG Z, et al. A cascade RF power sensor based on GaAs MMIC for improved dynamic range application ［C］ ∥ IEEE Symp RFIC. Tampa, FL, USA. 2014: 201-204.