• Journal of Infrared and Millimeter Waves
  • Vol. 21, Issue 1, 67 (2002)
[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MOLECULAR BEAM EPITAXIAL GROWTH OF 3-in HgCdTe WAFER[J]. Journal of Infrared and Millimeter Waves, 2002, 21(1): 67 Copy Citation Text show less

    Abstract

    The recent results on molecular beam epitaxial growth of 3-in HgCdTe wafers were reported. The composition uniformity in the wafer was found to be 1.2% in a diameter of 70 mm, corresponding to a deviation in cutoff wavelength of 0.1 μm at 80 K. By refining the growth conditions, the surface morphology was significantly improved. The defect density was reduced to below 300cm -2, and the defect size was suppressed to be smaller than 10μm. The material quality can meet the requirements of FPA fabrications.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MOLECULAR BEAM EPITAXIAL GROWTH OF 3-in HgCdTe WAFER[J]. Journal of Infrared and Millimeter Waves, 2002, 21(1): 67
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