[2] Downs M J, Nunn J W. Verification of the sub-nanometric of an NPL differential plane mirror interferometer with a capacitance probe[J]. Meas Sci Technol, 1998,9(7-9):1437-1440.
[2] Downs M J, Nunn J W. Verification of the sub-nanometric of an NPL differential plane mirror interferometer with a capacitance probe[J]. Meas Sci Technol, 1998,9(7-9):1437-1440.
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