[1] LUO Y, WANG X D, YANG F, et al.. Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cycio-Olefin Polymer (COP) ［J］. Opt. Precision Eng., 2007, 15(7): 1090-1095. (in Chinese)

[2] SONG M C, LIU Y, ZHU T L, et al.. Injection molding of plastic microfluidic chip ［J］. Nanotechnology and Precision Engineering, 2011, 9(4): 229-334.(in Chinese)

[3] JIANG B Y, SHEN R X, SHEN L J, et al.. Influence of processing parameters in injection molding on replication fidelity of microstructure parts［J］. Opt. Precision Eng., 2008, 16(2): 249-256. (in Chinese)

[4] ZHANG P, HU L H, LIU Y SH. Design and fabrication of micromixer with main-assist channels ［J］. Opt. Precision Eng., 2010, 18(4): 872-879.(in Chinese)

[5] YANG L X, HAO X J, WANG CH SH, et al.. Three-dimensional focusing microfluidic chip ［J］. Opt. Precision Eng., 2013, 21(9): 2309-2316. (in Chinese)

[6] YANG C, YIN X H, CHENG G M. Microinjection molding of microsystem components: new aspects in improving performance ［J］. J. Micromech. Microeng, 2013, 23: 093001.

[7] LIU SH J, DUNG Y T. Hot embossing precise structure on to plastic plates by ultrasonic vibration ［J］. Polymer Engineering and Science, 2005: 915-925.

[8] LIU SH J, HUANG Y CH, YANG S Y, et al.. Rapid fabrication of surface-relief plastic diffusers by ultrasonic embossing ［J］. Optics & Laser Technology, 2010, 42: 794-798.

[9] LIU S J, HUANG Y C. Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique ［J］. Optics Express, 2009, 17(20): 18083.

[10] YOUNG H C, YOUNG S S, YONG M, et al.. Facile fabrication of superhydrophobic poly(methyl methacrylate) substrates using ultrasonic imprinting ［J］. J. Micromech. Microeng, 2013, 23: 055019-1-7.

[11] HARUTAKA M, MASAHARU T. Ultrasonic nanoimprint on engineering plastics ［J］. J. Vac. Sci. Technol. A., 2009, 27(4): 785-792.

[12] LIN CH H, CHEN R SH. Ultrasonic nanoimprint lithography: a new approach to nanopatterning ［J］. Microlith., Microfab., Microsyst., 2006, 5(1): 011003-1-6.

[13] LIN CH H, WANG CH Y, CHEN R SH. Assisted-heating for ultrasonic nanoimprint lithography ［C］. 9th IEEE Conference on Nanotechnology, 2009.

[14] HARUTAKA M, OSAMU N, OSAMU M, et al.. Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration ［J］. Microsyst Technol., 2007, 13: 385-391.

[15] HARUTAKA M, HIROSHI G, MASAHARU T. Development of ultrasonic micro hot embossing technology ［J］. Microelectronic Engineering, 2007, 84: 1282-1287.

[16] HARUTAKA M, TOSHIHIKO N, HIROSHI G, et al.. Effect of applying ultrasonic vibration in thermal nanoimprint lithography［J］. Microsyst Technol., 2008, 14: 1325-1333.

[17] LI Y X, LI Y Q, QU L L, et al.. Microfluidic chip electrophoresis with laser-induced fluorescence detection for rapid analysis of four foodborne pathogenic bacteria ［J］. Chinese Journal of Analytical Chemistry, 2008, 36(12): 1667-1671. (in Chinese)

[18] ZHANG Z B, WANG X D, LUO Y, et al.. Study on heating process of ultrasonic welding for thermoplastics［J］. J. Thermoplast Compos. Mater., 2009, 23: 647-664.