• Laser & Optoelectronics Progress
  • Vol. 57, Issue 21, 212301 (2020)
Ren Wangtao1、2 and Xu Hongyan2
Author Affiliations
  • 1中国科学院光电技术研究所质检中心, 四川 成都 610209
  • 2中国科学院大学, 北京100049
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    DOI: 10.3788/LOP57.212301 Cite this Article Set citation alerts
    Ren Wangtao, Xu Hongyan. Method of Inverse Iteration Off-Axis Aspheric Surface Detection[J]. Laser & Optoelectronics Progress, 2020, 57(21): 212301 Copy Citation Text show less

    Abstract

    Off-axis aspheric surfaces are widely used in modern optical systems and generally require specific auxiliary optical elements to be detected. Accordingly, this study proposes a reverse iterative non-zero detection method that can be used to detect the same type of off-axis aspheric surfaces without auxiliary optical elements. First, we design a detection optical path and established a reverse iteration method to eliminate non-zero errors. Next, we analyz and compensated the system, adjustment, and random errors, as well as their processing methods. Finally, through a simulation, we obtain the RMS value of the surface shape of the off-axis aspheric surface using reverse iteration as 0.133λ, which is consistent with the actual surface shape of the simulation. The residual error of the simulation fitting is within 10 -5λ. In conclusion, the reverse iterative non-zero detection method is a high-precision and universal non-zero detection method for off-axis aspheric surfaces.