Pengfei YU, Bowen FU, Chuanyu LI, Chao LI, Lianqun ZHOU, Zhen GUO. Integrated zero-mode waveguide nanopore chip illuminated by evanescent field[J]. Optics and Precision Engineering, 2022, 30(1): 62
- Optics and Precision Engineering
- Vol. 30, Issue 1, 62 (2022)
Fig. 1. Structure and work flow of integrated chip
Fig. 2. Simulation result of coupled grating
Fig. 3. Relationship of distance between bottom of ZMWs and center of waveguide core with optical energy density at bottom of ZMWs
Fig. 4. Fabrication process of chip （The left and right sides of each image show different angles of the chip cross section）
Fig. 5. Chip characterization results
Fig. 6. Experimental apparatus and results for characteristic verification of integrated chips
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