• Journal of Semiconductors
  • Vol. 42, Issue 5, 052402 (2021)
Zhiqiang Ma1, Zhong Wu1, and Yue Xu1、2
Author Affiliations
  • 1College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
  • 2National and Local Joint Engineering Laboratory of RF integration & Micro-Assembly Technology, Nanjing 210023, China
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    DOI: 10.1088/1674-4926/42/5/052402 Cite this Article
    Zhiqiang Ma, Zhong Wu, Yue Xu. Compact SPAD pixels with fast and accurate photon counting in the analog domain[J]. Journal of Semiconductors, 2021, 42(5): 052402 Copy Citation Text show less
    A front-end circuit diagram of SPAD pixel, including a PQARC and an analog counter.
    Fig. 1. A front-end circuit diagram of SPAD pixel, including a PQARC and an analog counter.
    The timing diagram of pixel signals.
    Fig. 2. The timing diagram of pixel signals.
    (Color online) Die micrograph of the compact SPAD pixel.
    Fig. 3. (Color online) Die micrograph of the compact SPAD pixel.
    (Color online) Transient output avalanche pulse of the proposed quenching and recharging circuit. (a) Tested waveform. (b) Simulated waveform with on-chip buffer. (c) Simulated waveform without buffer.
    Fig. 4. (Color online) Transient output avalanche pulse of the proposed quenching and recharging circuit. (a) Tested waveform. (b) Simulated waveform with on-chip buffer. (c) Simulated waveform without buffer.
    (Color online) Readout voltage of the analog counter as a function of the photon-counting number.
    Fig. 5. (Color online) Readout voltage of the analog counter as a function of the photon-counting number.
    (Color online) Non-linearity characteristics of the analog counter. (a) Differential non-linearity (DNL). (b) Integral non-linearity (INL).
    Fig. 6. (Color online) Non-linearity characteristics of the analog counter. (a) Differential non-linearity (DNL). (b) Integral non-linearity (INL).
    (Color online) Output voltage step size as a function of (a) pulsewidth and (b) period for the analog counter.
    Fig. 7. (Color online) Output voltage step size as a function of (a) pulsewidth and (b) period for the analog counter.
    ParameterRef. [10] Ref. [13] Ref. [16] Ref. [18] Ref. [19] Ref. [20] Ref. [21] This work
    CMOS tech. (μm) 0.350.180.130.350.350.350.180.18
    Pixel size (μm) 205050251525
    Counting rate (Mcps)5016020125
    Counting methodAnalogAnalogAnalogAnalogAnalogAnalog
    Counting resolution (bit)686138
    Output voltage range (V)1.511.151.31.75
    DNL (LSB)< 0.7< 0.6< 1< 0.6
    INL (LSB)< 1.9< 1< 1.01< 1.2
    Pixel area (μm2) 54001500
    Fill factor (%)2.820.8219.2
    Power consumption (μW) 3001550010038.2
    Table 1. Summary of performance Comparison with SPAD pixels reported in the literature.
    Zhiqiang Ma, Zhong Wu, Yue Xu. Compact SPAD pixels with fast and accurate photon counting in the analog domain[J]. Journal of Semiconductors, 2021, 42(5): 052402
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