• Chinese Journal of Lasers
  • Vol. 46, Issue 11, 1104001 (2019)
Yuntao Wang1, Lei Chen1、*, Lu Kong1, Guang Yang2, and Chenhui Hu1
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science & Technology,Nanjing, Jiangsu 210094, China;
  • 2Advanced Launch Corporative Innovation Center, Nanjing University of Science & Technology,Nanjing, Jiangsu 210094, China;
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    DOI: 10.3788/CJL201946.1104001 Cite this Article Set citation alerts
    Yuntao Wang, Lei Chen, Lu Kong, Guang Yang, Chenhui Hu. Absolute Test via Three-Sphere Method Based on Odd/Even Functions and Fourier Series[J]. Chinese Journal of Lasers, 2019, 46(11): 1104001 Copy Citation Text show less

    Abstract

    To obtain the absolute distribution of a three-dimensional surface, a method for three-sphere construction based on odd/even functions and the Fourier series is proposed. According to the traditional three-sphere method, the measurement of a test surface rotating by 90° is included in the combined experiments. Further, the surface shape distribution is decomposed into orthogonal basis functions in the odd/even form, and the functions are all solved individually. The algorithm is simulated based on the actual shape, and the root mean square (RMS) of the residual error reaches 1.5λ/1000. The proposed three-sphere method is also compared with the two-sphere method and the random ball method; the maximum residual RMS is 1.99 nm. The rotation, translation, tilt, and defocus errors of the adjustment mechanism during the experiments are quantitatively analyzed; a maximum error of 0.90 nm is revealed. The absolute distribution of the three-dimensional surface is detected in this study, enabling synchronous full-aperture detection of multiple spherical mirrors.
    Yuntao Wang, Lei Chen, Lu Kong, Guang Yang, Chenhui Hu. Absolute Test via Three-Sphere Method Based on Odd/Even Functions and Fourier Series[J]. Chinese Journal of Lasers, 2019, 46(11): 1104001
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