A Novel Readout System for Wireless Passive Pressure Sensors

Huixin ZHANG; Yingping HONG; Binger GE; Ting LIANG; and Jijun XIONG

doi:10.1007/s13320-013-0155-y

[1] M. A. Fonseca, J. M. English, M. von Arx, and M. G. Allen, “Wireless micromachined ceramic pressure sensor for high-temperature applications,” Journal of Microelectromechanical Systems, 2002, 11(4): 337-343.

[2] E. D. Birdsell, J. Park, and M. G. Allen, “Wireless ceramic sensors operating in high temperature environments,” 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, 2004, July 11-14, pp. 1-10.

[3] E. D. Birdsell and M. G. Allen, “Wireless chemical sensors for high temperature environments,” Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, 2006, June 4-8, pp. 212-215.

[4] T. J. Harpster, S. Hauvespre, M. R. Dokmeci, and K. Najafi, “A passive humidity monitoring system for in situ remote wireless testing of micropackages,” Journal of Microelectromechanical Systems, 2002, 11(1): 61-67.

[5] P. J. Chen, S. Saati, R. Varma, M. S. Humayun, and Y. C. Tai, “Wireless intraocular pressure sensing using microfabricated minimally invasive flexible-coiled LC sensor implant,” Journal of Microelectromechanical Systems, 2010, 19(4): 721-734.

[6] V. Sridhar and K. Takahata, “A hydrogel-based passive wireless sensor using a flexcircuit inductive transducer,” Sensors and Actuators A: Physical, 2009, 155(1), 58-65.

[7] T. Salpavaara, J. Verho, P. Kumpulainen, and J. Lekkala, “Readout methods for an inductively coupled resonance sensor used in pressure garment application,” Sensors and Actuators A: Physical, 2011, 172(1): 58-65.

[8] C. C. Collins, “Miniature passive pressure transensor for implanting in the eye,” IEEE Transactions on Biomedical Engineering, 1967, BME-14(2): 74-83.

[9] Sajeeda and T. J. Kaiser, “Passive telemetric readout system,” IEEE Sensors Journal, 2006, 6(5): 1340-1345.

[10] R. Nopper, R. Has, and L. Reindl, “A wireless sensor readout system circuit concept, simulation, and accuracy,” IEEE Transactions on Instrumentation and Measurement, 2011, 60(8): 2976-2983.

[11] D. Marioli, E. Sardini, M. Serpelloni, and A. Taroni, “A distance compensated telemetric humidity sensor based on the parasitic capacitance variation,” Proc. of the IEEE Instrumentation and Measurement Technology Conference, 2008, pp. 655-660.

[12] S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (2nd Edition). London, UK: McGraw Hill, 1959.

[13] M. A. Fonseca, “Polymer/ceramic wireless MEMS pressure sensors for harsh environments: high temperature and biomedical application,” Ph.D. Dissertation, School of Electrical and Computer Engineering, 2007.

[14] S. S. Mohan, M. Del Mar Hershenson, S. P. Boyd, and T. H. Lee, “Simple accurate expressions for planar spiral inductances,” IEEE Journal of Solid-state Circuits, 1994, 34(10): 1419-1424.

[15] J. J. Xiong, Y. Li, Y. P. Hong, B. Z. Zhang, T. H. Cui, Q. L. Tan, et al., “Wireless LTCC-based capacitive pressure sensor for harsh environment,” Sensors and Actuators A: Physical, 2013, 197: 30-37.