This paper presents the design and fabrication of a novel optically readable thermal imaging device based on Fabry-Perot micro-cavity array made on silicon substrate, which directly translates thermal imaging into visible imaging by using optically readable technology. The focal plane array(FPA) of this device is a Fabry-Perot micro-cavity array based on microelectromechanical system (MEMS) technology. The structure and thermo-mechanical designs of movable micromirror, and the design of the visible readable setup are completed. Theoretical analysis indicates