Principle and Design of an IR Detector for a Novel Room Temperature MEMS

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 2 >Page 34 > Article

Opto-Electronic Engineering
Vol. 31, Issue 2, 34 (2004)

Principle and Design of an IR Detector for a Novel Room Temperature MEMS

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Design of an IR Detector for a Novel Room Temperature MEMS[J]. Opto-Electronic Engineering, 2004, 31(2): 34 Copy Citation Text

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References

[1] ANTONI R.Infrared detectors:an overview[J].Infrared Physics & Technology,2002,43(3):187-210.

[3] NORTON P R.Infrared detectors in the next millennium[A].SPIE,1999,3698:652-665.

[5] WU J M,ZOU D S,GAO G,et al.Influences of various dielectric materials on p++ silicon diaphragm[A].Proceeding of Solid-State and Integrated-Circuit Technology [C].Beijing:PPTPH and IEEE press,2001,2:823-826.

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