• Infrared Technology
  • Vol. 44, Issue 9, 964 (2022)
Guiquan WANG*, Zhiwen XU, Yongjin DUAN, Haokun SHI, Xuke JIANG, Yansheng LI, Yuxuan ZHANG, and Jie ZHANG
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article
    WANG Guiquan, XU Zhiwen, DUAN Yongjin, SHI Haokun, JIANG Xuke, LI Yansheng, ZHANG Yuxuan, ZHANG Jie. An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing[J]. Infrared Technology, 2022, 44(9): 964 Copy Citation Text show less


    In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners. Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.