• Journal of Infrared and Millimeter Waves
  • Vol. 34, Issue 3, 291 (2015)
SUN Shi-Wen*, SUI Song-Yin, HE Li, WEI Yan-Feng, ZHOU Chang-He, YU Hui-Xian, and XU Chao
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.11972/j.issn.1001-9014.2015.03.007 Cite this Article
    SUN Shi-Wen, SUI Song-Yin, HE Li, WEI Yan-Feng, ZHOU Chang-He, YU Hui-Xian, XU Chao. X-ray diffraction topography and etched surface morphology of CdZnTe single crystals[J]. Journal of Infrared and Millimeter Waves, 2015, 34(3): 291 Copy Citation Text show less
    References

    [1] Reddy M, Peterson J M, Vang T, et al. Molecular Beam Epitaxy Growth of HgCdTe on Large-Area Si and CdZnTe Substrates [J]. Journal of Electronic Materials, 2011, 40(8): 1706-1716.

    [2] Hansson C C T, Owens A, Van der Biezen J. X-ray, gamma-ray and neutron detector development for future space instrumentation [J]. Acta Astronautica, 2014, 93: 121-128.

    [3] Zha G Q, Xiang H, Liu T, et al. The analysis of X-ray response of CdZnTe detectors [J]. Science China-Technological Sciences, 2012, 55(8): 2295-2299.

    [4] Yang R L, Bai Z Z, Wang D Z, et al. High efficient thin film CdTe solar cells [J]. Proceedings of the 2013 Spanish Conference on Electron Devices (Cde 2013), 2013: 341-344.

    [5] Sun S W, Zhou C H, Yu H X, et al. Progress in the CdZnTe Single Crystal Growth and Substrates Fabrication [J]. International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications, 2013: 8907.

    [6] Peter Capper, James Garland. Mercury Cadmium Telluride: Growth, Properties and Applications [M], Chichester: John Wiley & Sons Ltd., 2011: 21.

    [7] Cui X P, Fang W Z, Sun S W, et al. Characteristics of the dislocations in CdZnTe crystals revealed by etch pits [J]. Journal of Crystal Growth, 2011, 321(1): 40-44.

    [8] Sheng F F, Cui X P, Sun S W, et al. Etch pits of precipitates in CdZnTe crystals on (111) B surface [J]. Journal of Crystal Growth, 2012, 354(1): 76-80.

    [9] Bowen D K, Tanner, B K. X-ray Metrology in Semiconductor Manufacturing [M], Boca Raton: CRC Press, 2006.

    [10] David R. Black and Gabrielle G. Long, X-Ray Topography [M], Washington: U.S. Goverment Printing Office, 2004: 1.

    [11] Carini G A, Camarda G S, Zhong Z, et al. High-energy X-ray diffraction and topography investigation of CdZnTe [J]. Journal of Electronic Materials, 2005, 34(6): 804-810.

    [12] Markunas J K, Almeida L A, Jacobs R N, et al. X-ray Diffraction Imaging of Improved Bulk-Grown CdZnTe(211) and Its Comparison with Epitaxially Grown CdTe Buffer Layers on Si and Ge Substrates [J]. Journal of Electronic Materials, 2010, 39(6): 738-742.

    [13] Egan C K, Choubey A, Moore M, et al. Characterisation of vapour grown CdZnTe crystals using synchrotron X-ray topography [J]. Journal of Crystal Growth, 2012, 343(1): 1-6.

    [14] Bowen D K, Wormington M, Feichtinger P. A novel digital x-ray topography system [J]. Journal of Physics D-Applied Physics, 2003, 36(10A): A17-A23.

    [15] Bowen D K, Wormington M, Feichtinger P, et al. Full-wafer defect identification using x-ray topography [J]. Characterization and Metrology for Ulsi Technology, 2003, 683: 284-288.

    [16] Bowen D K, Wormington M, Pina L, et al. X-ray Topographic System [P]. U. S. Patent 6, 782, 076, granted 2004.

    SUN Shi-Wen, SUI Song-Yin, HE Li, WEI Yan-Feng, ZHOU Chang-He, YU Hui-Xian, XU Chao. X-ray diffraction topography and etched surface morphology of CdZnTe single crystals[J]. Journal of Infrared and Millimeter Waves, 2015, 34(3): 291
    Download Citation