Investigation on the Si-Based Hybrid Integrated Micro-Structured Laser with Silicon Waveguide Output for Silicon Photonic Integration

Wang Hailing; Zhang Yejin; Feng Peng; Qu Hongwei; Zheng Wanhua

doi:10.3788/lop51.110007

[1] H Rong, R Jones, A Liu, et al.. A continuous-wave Raman silicon laser [J]. Nature, 2005, 433(7027): 725-728.

[2] S G Cloutier, P A Kossyrev, J Xu. Optical gain & stimulated emission in periodic nanopatterned crystalline silicon [J]. Nature Materials, 2005, 4(2): 887–891.

[3] L Pavesi, L D Negro, C Mazzoleni, et al.. Optical gain in silicon nanocrystals [J]. Nature, 2000, 408(6811): 440-444.

[4] A Irrera, D Pacifici. Electroluminescence properties of light emitting devices based on silicon nanocrystals [J]. Physica E, 2003, 16(5): 395-399.

[5] D Liang, J E Bowers. Recent progress in lasers on silicon [J]. Nat Photon, 2010, 4(3): 511-517.

[6] Wang Huayong, Xu Xingsheng. Research progress of photonic crystal vertical cavity surface emitting laser [J]. Laser & Optoelectronics Progress, 2012, 49(9): 090003.

[7] Zhou Zhiping, Gao Dingshan, Wang Yi, et al.. Progress on Si-based optoelectronic devices and integration [J]. Laser & Optoelectronics Progress, 2007, 44(2): 31-38.

[8] Wang Huolei, Kong Liang, Pan Jiaoqing, et al.. Recent progress of semiconductor mode-locked lasers [J]. Laser & Optoelectronics Progress, 2013, 50(5): 050001.

[9] T Hong, Y Li, W Chen, et al.. Bonding InGaAsP/ITO/Si hybrid laser with ITO as cathode and light-coupling material [J]. IEEE Photon Tech Lett, 2012, 24(7): 712-714.

[10] A W Fang, H Park, O Cohen, et al.. Electrically pumped hybrid AlGaInAs-silicon evanescent laser [J]. Opt Express, 2006, 14(20): 9203-9210.

[11] T Hong, G Ran, T Chen, et al.. A selective-area metal bonding InGaAsP-Si laser [J]. IEEE Photon Tech Lett, 2010, 22(6): 1141-1143.

[12] Q Y Lu, W H Guo, D Byrne, et al.. Design of slotted single-mode lasers suitable for photonic integration [J]. IEEE Photon Tech Lett, 2010, 22(7): 787-789.

[13] Y Zhang, H Qu, W Zheng, et al.. A hybrid silicon single mode laser with a slotted feedback structure [J]. Opt Express, 2013, 21(1): 877-883.

[14] Y Zhang, H Wang, W Zheng, et al.. A slotted hybrid III-V/silicon single mode laser [J]. IEEE Photon Tech Lett, 2013, 25(7): 655-658.

[15] Y Zhang, H Qu,W Zheng, et al.. A III-V/silicon hybrid racetrack ring single-mode laser with periodic microstructures [J]. Opt Commun, 2013, 301(3): 112-115.

[16] Y Zhang, H Qu, W Zheng, et al.. Hybrid III-V/silicon single-mode laser with periodic microstructures [J]. Opt Lett, 2013, 38(6): 842-844.

[17] Y Zhang, H Wang, W Zheng, et al.. A hybrid silicon single-mode laser with a racetrack ring and periodic slots [J]. Microwave and Optical Technology Letter, 2013, 55(9): 2141-2143.

[18] D Pasquariello, K Hjort. Plasma-assisted InP-to-Si low temperature wafer bonding [J]. IEEE J Sel Top Quantum Electron, 2002, 8(1): 118-131.

[19] D Liang, G Roelkens, R Baets, et al.. Hybrid integrated platforms for silicon photonics [J]. Materials, 2010, 3(3): 1782-1802.

[20] H Park, A W Fang, S Kodama, et al.. Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V off set quantum wells [J]. Opt Express, 2005, 13(23): 9460-9464.

[21] H Park. Design and fabrication of optically pumped hybrid silicon-AlGaInAs evanescent lasers [J]. IEEE J Sel Top Quantum Electron, 2006, 12 (6): 1657-1663.

[22] A W Fang, H Park, O Cohen, et al.. Electrically pumped hybrid AlGaInAs-silicon evanscent laser [J]. Opt Express, 2006, 14(20): 9203-9210.

[23] S Srinivasan, A W Fang, D Liang, et al.. Design of phase-shifted hybrid silicon distributed feedback lasers [J]. Opt Express, 2011, 19(10): 9255-9261.

[24] S Srinivasan, J E Bowers. Reliability of hybrid III-V on Si distributed feedback lasers [C]. IEEE International Semiconductor Laser Conference, 2012. 10-11.

[25] A W Fang, E Lively, Y H Kuo, et al.. A distributed feedback silicon evanescent laser [J]. Opt Express, 2008, 16(7): 4413-4419.

[26] S Stankovic. Hybrid III-V/Si distributed-feedback laser based on adhesive bonding [J]. IEEE Photon Tech Lett 2012, 24(23): 2155-2158.

[27] A W Fang, B R Koch, R Jones, et al.. A distributed Bragg reflector silicon evanescent laser [J]. IEEE Photon Tech Lett, 2008, 20(20): 1667-1669.

[28] B B Bakir, A Descos, N Olivier, et al.. Hybrid silicon/III-V laser sources based on adiabatic mode transformers [C]. SPIE, 2012, 8264: 82640C.

[29] T Baba, M Fujita, A Sakai, et al.. Lasing characteristics of GaInAsP-InP strained quantum-well microdisk injection lasers with diameter of 2~10 mm [J]. IEEE Photon Technol Lett, 1997, 9(7): 878-880.

[30] C J Seung, K Djordjev, S J Choi, et al.. Microdisk lasers coupled to output waveguides [J]. IEEE Photon Technol Lett, 2003, 15(10): 1330-1332.

[31] S L McCall, A F J Levi, R F Slusher, et al.. Whispering-gallery mode microdisk lasers [J]. Appl Phys Lett, 1992, 60(3): 289-291.

[32] M Fujita, R Ushigome, T Baba. Continuous wave lasing in GaInAsP microdisk injection laser with threshold current of 40 mA [J]. Electron Lett, 2000, 36(9): 790-791.

[33] J V Campenhout, L Liu. A compact SOI-integrated multiwavelength laser source based on cascaded InP microdisks [J]. IEEE Photon Tech Lett, 2008, 20(6): 1345-1347.

[34] L Liu, T Spuesens, V Thourhout, et al.. A thermally tunable microdisk laser built on a III-V/Silicon-on-insulator heterogeneous integration platform [J]. IEEE Photon Tech Lett, 2010, 22(1): 1270-1271.

[35] P Rojo Romeo, J Van Campenhout, P Regreny, et al.. Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs [J]. Opt Express, 2006, 14(9): 3864-3871.

[36] J Van Campenhout, P Rojo-Romeo, P Regreny, et al.. Electrically pumped InP-based microdisk laser sintegrated with a nanophotonic silicon-on-insulator waveguide circuit [J]. Opt Express, 2007, 15(11): 6744-6749.

[37] T Spuesens, L Liu, T de Vries, et al.. Improved design of an InP-based microdisk laser heterogeneously integrated with SOI [C]. Proc 6th IEEE Int Conf Group IV Photon, 2009. 202-204.

[38] A W Fang, R Jones, H Park, et al.. Integrated AlGaInAs-silicon evanescent race track laser andphotodetector [J]. Opt Express, 2007, 15(5): 2315-2322.

[39] D Liang, M Florentino, T Okumura, et al.. Electrically-pumped compact hybrid silicon microning lasers for optical interconnects [J]. Opt Express, 2009, 17(22): 20355–20364.

[40] D Liang, M Fiorentino, S Srinivasan, et al.. Low threshold electrically-pumped hybrid silicon microring lasers [J]. IEEE J Sel Top Quantum Electron, 2011, 17(6): 1528-1533.

[41] D Liang, S Srinivasan, D A Fattal, et al.. Teardrop reflector-assisted unidirectional hybrid silicon microring lasers [J]. IEEE Photon Technol Lett, 2012, 24(22): 1988-1990.

[42] S Keyvaninia, G Roelkens, D Van Thourhout, et al.. Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser [J]. Opt Express, 2013, 21( 3): 3784-3792.

[43] A Le Liepvre, C Jany, A Accard, et al.. Widely wavelength tunable hybrid III-V/silicon laser with 45 nm tuning range fabricated using a wafer bonding technique [C]. IEEE 9th International Conference on Group IV Photonics, 2012. 54-56.

[44] A L Liepvre, A Accard, F Poingt, et al.. Wavelength selectable hybrid III-V/Si laser fabricated by wafer bonding [J]. IEEE Photon Technol Lett, 2013, 25(16): 1582-1585.

[45] B R Koch, E J Norberg, B Kim, et al.. Integrated silicon photonic laser sources for telecom and datacom [C]. national Fiber Optic engineers Conference, 2013. PDP5C.8.