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    Journals >Acta Optica Sinica >Volume 31 >Issue 3 >Page 322002 > Article
    • Acta Optica Sinica
    • Vol. 31, Issue 3, 322002 (2011)
    Freeform-Surface Design of Off-Axis Illumination in Projection Lithography
    Xing Shasha*, Wu Rengmao, Li Haifeng, Zheng Zhenrong, and Liu Xu
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    DOI: 10.3788/aos201131.0322002 Cite this Article Set citation alerts
    Xing Shasha, Wu Rengmao, Li Haifeng, Zheng Zhenrong, Liu Xu. Freeform-Surface Design of Off-Axis Illumination in Projection Lithography[J]. Acta Optica Sinica, 2011, 31(3): 322002 Copy Citation Text show less
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    Xing Shasha, Wu Rengmao, Li Haifeng, Zheng Zhenrong, Liu Xu. Freeform-Surface Design of Off-Axis Illumination in Projection Lithography[J]. Acta Optica Sinica, 2011, 31(3): 322002
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