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    Journals >Laser & Optoelectronics Progress >Volume 54 >Issue 8 >Page 82201 > Article
    • Laser & Optoelectronics Progress
    • Vol. 54, Issue 8, 82201 (2017)
    Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment
    Tong Junmin1、2、*, Liu Junbo2, and Hu Song2
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    DOI: 10.3788/lop54.082201 Cite this Article Set citation alerts
    Tong Junmin, Liu Junbo, Hu Song. Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment[J]. Laser & Optoelectronics Progress, 2017, 54(8): 82201 Copy Citation Text show less
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    Tong Junmin, Liu Junbo, Hu Song. Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment[J]. Laser & Optoelectronics Progress, 2017, 54(8): 82201
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