Fig. 1. Schematics and electric field distributions of several typical 1D PC nanobeam cavities. (a) Dielectric-mode cavity[8]; (b) air-mode cavity[9]; (c) slot-based cavity[10]
Fig. 2. Energy band diagram of dielectric-mode nanobeam cavity[8]
Fig. 3. Energy band diagram of air-mode nanobeam cavity[8]
Fig. 4. 1D nanobeam cavity PC sensors based on side-cavity-coupling. (a) Multiplexing sensor array with multiple nanobeams[61-63]; (b) dual-parameter sensor based on double nanobeam cavity cascading[64]
Fig. 5. Design of 1D nanobeam cavity PC sensor array based on multi-cavity and multi-channel. (a) 32-channel parallel integrated sensor array[65]; (b) branch-cascaed additional filters[66]; (c) own FSR performance of each branch after direct optimization[67]
Fig. 6. Designs of 2D PC sensor array based on multi-cavity and single-channel. (a) Series integrated sensor array[68-69]; (b)-(d) side-cavity-coupled integrated sensor array[70-71]
Fig. 7. Designs of 2D slab PC sensor array based on multi-cavity and multi-channel. (a)-(c) Dua-channel sensor arrays[73-74]; (d) three-channel sensor arrays[75]; (e)-(f) four-channel sensor arrays[76-77]
Fig. 8. Design of sensor arrays based on PC cavity and filter cascading. (a) From reference [78]; (b) from reference [79]
Fig. 9. (a) 64-cavity integrated sensor array[80]; (b) on-chip multi-functional sensor platform[81]
Reference | Structure | Q | Research type |
---|
[3] | | 256 | Experiment | [4] | | 105 | Experiment | [5] | | 6.3×107 | Experiment | [6] | | 1.49×105 | Experiment | [7] | | 7.5×105 | Experiment | [8] | | 109 | Experiment |
|
Table 1. Studies for improving Q factor value of nanobeam cavity
Reference | Structure | Q | Sensitivity /(nm·RIU-1) | Detection limit /RIU | Analyte | Research type |
---|
[57] | | 7.1761×104 | 902 | 10-6 | Liquid | Simulation | [58] | | 1.06×104 | >800 | 1.6×10-7 | Liquid | Experiment | [59] | | 5.5×103 | 298 | 1.3×10-6 | Liquid | Experiment | [60] | | 1.8×104 | 94.5 | 3×10-6 | Liquid | Experiment |
|
Table 1. 0 2D slab PC structure with guided-mode resonance applied in sensing field
Reference | Structure | Q | Sensitivity | Analyte | Research type |
---|
[11] | | 3.6×104 | 386 nm·RIU-1 | Glucose solution | Experiment | [12] | | 2.7×104 | 269 nm·RIU-1 | Liquid | Experiment | [13] | | 106 | 190 nm·RIU-1 | Gas | Simulation | [14] | | 104 | 10-5 | Gas | Experiment | [15] | | 106 | 98 nm·RIU-1 | Liquid | Experiment | [16] | | 1.3×104 | 428 nm·RIU-1 | NaCl solution | Experiment | [17] | | 3.5×104 | 58 nm·RIU-1 | Ternary liquid mixture | Experiment |
|
Table 2. 1D PC dielectric-mode nanobeam cavity applied in sensing field
Referece | Structure | Q | Sensitivity /(nm·RIU-1) | Analyte | Research type |
---|
[18] | | 2.5×105 | - | Nano-particle | Experiment | [19] | | 770 | 461 | Liquid | Experiment | [9] | | 104 | 537.8 | Liquid | Simulation | [20] | | 104 | 389 | Liquid | Simulation | [21] | | 105 | 252 | Gas | Simulation |
|
Table 3. 1D PC air-mode nanobeam cavity applied in sensing field
Reference | Structure | Q | Sensitivity /(nm·RIU-1) | Analyte | Research type |
---|
[22] | | 3×103 | 700 | Sucrose solution | Experiment | [23] | | 104 | 410 | NaCl solution | Experiment | [24] | | 6.08×106 | 460 | Liquid | Simulation | [25] | | 103 | 234 | Gas | Experiment | [26] | | 105 | 851 | Gas | Simulation | [27] | | 4.5×107 | - | Polystyrene particles | Simulation | [28] | | 7×103 | 451 | Ethanol solution | Experiment | [10] | | 107 | 900 | Gas | Simulation | [29] | | 1.14×107 | 451 | Liquid | Simulation |
|
Table 4. 1D PC slot-based nanobeam cavity applied in sensing field
Reference | Structure | Q | Sensitivity /(nm·RIU-1) | Research type |
---|
[30] | | 2097 | 1017.98 | Simulation | [31] | | <50 | 2184 | Experiment |
|
Table 5. 1D PC surface-mode cavity applied in sensing field
Reference | Structure | Q | Research type |
---|
[32] | | 4.5×104 | Experiment | [33] | | 105 | Simulation | [34] | | 106 | Experiment | [35] | | 3×103 | Experiment | [36] | | 103 | Simulation | [37] | | 9.3×103 | Experiment | [38] | | 106 | Simulation |
|
Table 6. 2D slab PC point-defect cavity with high quality factor
Reference | Structure | Q | Sensitivity | Analyte | Research type |
---|
[39] | | about 3×103 | - | Bio-molecule | Simulation | [40] | | 2.676×104 | 15 ng/mL | Biomacro-molecule | Experiment | [41] | | 1.4×104 | 3.35 pg/mL | Antibiotic proteins combined with biotin | Experiment | [42] | | 2.966×103 | 131.70 nm/RIU | Liquid | Simulation | [43] | | - | - | Biomacro-molecule | Simulation | [44] | | - | - | Biomacro-molecule | Experiment |
|
Table 7. 2D PC point-defect cavity applied in biochemical sensing field
Reference | Structure | Q | Sensitivity /(nm·RIU-1) | Analyte | Research type |
---|
[45] | | 6×105 | - | - | Experiment | [46] | | 3.82×106-1.01×106 | 171,360 | Gas | Simulation | [47] | | 5×104 | 150 | Liquid | Experiment | [48] | | 2.6×104 | 510 | Gas | Experiment | [49] | | 2.5×104 | 235 | Liquid | Experiment |
|
Table 8. 2D PC heterostructure cavity applied in sensing field
Reference | Structure | Detection limit | Analyte | Research type |
---|
[50] | | 0.2 fg | Bovine serum albumin | Experiment | [51] | | 10-4 | Methane | Experiment | [52] | | 10-6 | Acetylene | Simulation | [53] | | 1.56×10-6 | Gas | Simulation |
|
Table 9. 2D PC slow-light waveguide applied in sensing field