• Journal of Semiconductors
  • Vol. 46, Issue 4, 042401 (2025)
Lingchen Liu1,2, Ying Yuan1,3, Hao Xu1,*, Xiaokun Qin1,2..., Xiaofeng Wang1,4, Zheng Lou1,2,** and Lili Wang1,2,***|Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Lignocellulosic Chemistry, College of Material Science and Technology, Beijing Forestry University, Beijing 100083, China
  • 4Sino-Russian International Joint Laboratory for Clean Energy and Energy Conversion Technology, College of Physics, Jilin University, Changchun 130012, China
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    DOI: 10.1088/1674-4926/24110017 Cite this Article
    Lingchen Liu, Ying Yuan, Hao Xu, Xiaokun Qin, Xiaofeng Wang, Zheng Lou, Lili Wang. Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. Journal of Semiconductors, 2025, 46(4): 042401 Copy Citation Text show less
    (Color online) Human health detection system based on MXene/PEO flexible sensors. (a) Schematic diagram of the pulse monitoring system based on MXene/PEO flexible pressure sensor. (b) Schematic diagram of the structure of the MXene/PEO flexible pressure sensor. (c) Schematic diagram of the comparison of sensing range and sensitivity of different pressure sensors.
    Fig. 1. (Color online) Human health detection system based on MXene/PEO flexible sensors. (a) Schematic diagram of the pulse monitoring system based on MXene/PEO flexible pressure sensor. (b) Schematic diagram of the structure of the MXene/PEO flexible pressure sensor. (c) Schematic diagram of the comparison of sensing range and sensitivity of different pressure sensors.
    (Color online) Pressure response of the MXene/PEO flexible sensor. (a) Schematic diagram of the MXene/PEO sensor at no load and under load. (b) The minimum pressure detection limit of the sensor. (c) Dynamic pressure-sensitive response of the MXene/PEO flexible sensor at different pressure levels. (d) Response and recovery time of the MXene/PEO flexible sensor. (e) and (f) I−V curves of the MXene/PEO-based flexible sensor at different pressures. (g) The sensitivity curves of the MXene/PEO flexible sensor at different pressures range from 44.34 kPa−1 at 0.10 to 50 kPa and 12.99 KPa−1 at 50 to 500 kPa.
    Fig. 2. (Color online) Pressure response of the MXene/PEO flexible sensor. (a) Schematic diagram of the MXene/PEO sensor at no load and under load. (b) The minimum pressure detection limit of the sensor. (c) Dynamic pressure-sensitive response of the MXene/PEO flexible sensor at different pressure levels. (d) Response and recovery time of the MXene/PEO flexible sensor. (e) and (f) I−V curves of the MXene/PEO-based flexible sensor at different pressures. (g) The sensitivity curves of the MXene/PEO flexible sensor at different pressures range from 44.34 kPa−1 at 0.10 to 50 kPa and 12.99 KPa−1 at 50 to 500 kPa.
    (Color online) Preparation, characterization and mechanical properties testing of MXene/PEO CNM. (a) Schematic diagram of the fabrication process of MXene/PEO CNM-based pressure sensors. (b) Scanning electron microscopy (SEM) image of MXene/PEO CNM prepared using 4 wt% PEO. (c) SEM image of MXene/PEO CNM prepared using 5 wt% PEO. (d) Pressure-sensitive response diagram of MXene/PEO flexible sensor at different bending angles. (e) Stability of MXene/PEO flexible sensors.
    Fig. 3. (Color online) Preparation, characterization and mechanical properties testing of MXene/PEO CNM. (a) Schematic diagram of the fabrication process of MXene/PEO CNM-based pressure sensors. (b) Scanning electron microscopy (SEM) image of MXene/PEO CNM prepared using 4 wt% PEO. (c) SEM image of MXene/PEO CNM prepared using 5 wt% PEO. (d) Pressure-sensitive response diagram of MXene/PEO flexible sensor at different bending angles. (e) Stability of MXene/PEO flexible sensors.
    (Color online) Human pulse monitoring system based on MXene/PEO flexible sensors. (a) Schematic diagram of a human pulse monitoring system. (b) In the resting state, the pulse signal detected by the pulse monitoring system. (c) After exercise, the pulse monitoring system detects the pulse signal.
    Fig. 4. (Color online) Human pulse monitoring system based on MXene/PEO flexible sensors. (a) Schematic diagram of a human pulse monitoring system. (b) In the resting state, the pulse signal detected by the pulse monitoring system. (c) After exercise, the pulse monitoring system detects the pulse signal.
    Lingchen Liu, Ying Yuan, Hao Xu, Xiaokun Qin, Xiaofeng Wang, Zheng Lou, Lili Wang. Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. Journal of Semiconductors, 2025, 46(4): 042401
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