Influence of laser power variation on laser-induced changes of crystalline silicon

Yang Chengjuan; Mei Xuesong; Wang Wenjun; Tian Yanling; Zhang Dawei; Cui Liangyu

doi:10.3788/irla201645.0106006

[1] Huang Yinquan. Application of laser in the fabrication of microelectronic devices[J]. Infrared and Laser Engineering, 1991, 20(3): 1-5. (in Chinese)

[2] Zhu Qianbin. Status, development trend and key technology of Micro mechanical processing technology[J]. Precise Manufacturing & Automation, 2002, 2: 9-11. (in Chinese)

[3] He Yilong, Zhang Lixian, Li Ting, et al. Technology of silicon-based MEMS[J]. Journal of Mechanical Strength, 2001, 23(4): 523-526. (in Chinese)

[4] Wang X, Xu X. Thermoelastic wave in metal induced by ultrafast laser pulses[J]. J Therm Stresses, 2002, 25(5): 457-473.

[5] Henyk M, Costache F, Reif J. Femtosecond laser ablation from sodium chloride and barium fluoride[J]. Appl Surf Sci, 2002, 186(1): 381-384.

[6] Juhasz T, Loesel F H, Kurtz R M, et al. Corneal refractive surgery with femtosecond lasers[J]. IEEE J Sel Top Quant, 1999, 5(4): 902-910.

[7] Keller U. Recent developments in compact ultrafast lasers[J]. Nature, 2003, 424(6950): 831-838.

[8] Cui Chengyun, Cui Xigui, Shi Guifeng. Surface morphology of non-metallic solid materials after laser carving[J]. Infrared and Laser Engineering, 2014, 43(12): 3932-3936. (in Chinese)

[9] Bonse J, Brzezinka K-W, Meixner A. Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy[J]. Appl Surf Sci, 2004, 221(1): 215-230.

[10] Borowiec A, Mackenzie M, Weatherly G, et al. Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon[J]. Appl Phys A-Mater, 2003, 76 (2): 201-207.

[11] Russo R E, Mao X, Gonzalez J J, et al. Femtosecond laser ablation ICP-MS[J]. J Anal Atom Spectrom, 2002, 17(9): 1072-1075.

[12] Men Haining. The mechanics and application during femtosecond laser and solid material interaction[D]. Xi′an: Xi′an Institute of Optics & Precision Mechanics, Chinese Academy of Science, 2006. (in Chinese)

[13] Choi T Y, Hwang D J, Grigoropoulos C P. Ultrafast laser-induced crystallization of amorphous silicon films[J]. Opt Eng, 2003, 42 (11): 3383-3388.

[14] Yang C, Wang Y, Xu X. Molecular dynamics studies of ultrafast laser-induced phase and structural change in crystalline silicon[J]. Int J Heat Mass Tran, 2012, 55: 6060-6066.

[15] Yen R, Liu J, Kurz H, et al. Space-time resolved reflectivity measurements of picosecond laser-pulse induced phase transitions in(111) silicon surface layers[J]. Appl Phys A-Mater, 1982, 27 (3): 153-160.

[16] Liu P, Yen R, Bloembergen N, et al. Picosecond laser-induced melting and resolidification morphology on Si[J]. Appl Phys Lett, 1979, 34(12): 864-866.

[17] Cerny R, Cháb V, Ivlev G, et al. Modeling the phase-change processes in pulsed laser-irradiated InSb[J]. Phys Rev B, 1999, 59(16): 10685-10690.

[18] [19] Jia J, Li M, Thompson C V. Amorphization of silicon by femtosecond laser pulses[J]. Appl Phys Lett, 2004, 84(16): 3205-3207.

Kim AM-T, Callan J P, Roeser CAD, et al. Ultrafast dynamics and phase changes in crystalline and amorphous GaAs[J]. Phys Rev B, 2002, 66(245203): 1-13.

[19] Rogers M S, Grigoropoulos C P, Minor A M, et al. Absence of amorphous phase in high power femtosecond laser-ablated silicon[J]. Appl Phys Lett, 2009, 94(011111): 1-3.

[20] Bonse J. All-optical characterization of single femtosecond laser-pulse-induced amorphization in silicon[J]. Appl Phys A-Mater, 2006, 84 (1-2): 63-66.

[21] Izawa Y, Tokita S, Fujita M, et al. Ultrathin amorphization of single-crystal silicon by ultraviolet femtosecond laser pulse irradiation[J]. J Appl Phys, 2009, 105 (064909): 1-4.

[22] Kiani A, Venkatakrishnan K, Tan B. Micro/nano scale amorphization of silicon by femtosecond laser irradiation[J]. Opt Express, 2009, 17(19): 16518-16526.

[23] Barsch N, Korber K, Ostendorf A, et al. Ablation and cutting of planar silicon devices using femtosecond laser pulses[J]. Appl Phys A-Mater, 2003, 77(2): 237-242.

[24] Milovanovi Dubravka S, Petrovic Suzana M, Shulepov Mikhail A, et al. Titanium alloy surface modification by excimer laser irradiation[J]. Opt Laser Technol, 2013, 54: 419-427.

[25] Yang C J, Mei X S, Wang W J, Comparative experimental study of laser-induced transitions in crystalline silicon by femtosecond, picosecond and millisecond Laser ablation[J]. Radiat Eff Defect S, 2014, 169(3): 194-203.