Fig. 1. Comparison of the
D* of various available detectors when operated at the indicated temperature and in the region of 1−10 000 μm waveband
[4] Fig. 2. Hybrid HgCdTe IRFPA detector with independently optimized signal detection and readout. (a) Indium column flip chip interconnection; (b) Loophole interconnection
[5] Fig. 3. Development roadmap and memorabilia for the first generation to the fourth generation of infrared detectors
[4] Fig. 4. H2 RG 2 048×2 048 HgCdTe FPA detector
[6] Fig. 5. 2 048×2 048 HgCdTe FPA used in the Space Telescope Near Infrared Camera
[6] Fig. 6. Quantum efficiency of the H2 RG 2 048×2 048 HgCdTe FPA with 0.8-1.7 μm cutoff which CdZnTe substrate was removed
[7] Fig. 7. Euclid focal plane assembly with 16 H2 RG FPA (2048×2048) (a) and the measured quantum efficiencies (b)
[7] Fig. 8. H4 RG 4 096×4 096 HgCdTe FPA assembly
[8] Fig. 9. (a) Cross-section of Raytheon’s single-mesa dual-band pixel architecture applied to HgCdTe on Si grown by MBE; (b) Scanning electron micrograph of dual-band pixels
[9] Fig. 10. Two-color HgCdTe IR detective structure on GaAs grown by MBE
[10] Fig. 11. Two-color n-p-n HgCdTe IR detective structure on CdZnTe grown by MBE
[11]. (a) Side view; (b) Stereoscopic view
Fig. 12. (a) Energy band diagram illustrating the dark current mechanisms for a HgCdTe p-n junction
[12]; (b) Energy band diagrams of HgCdTe n
+-B
n-n junction
[13] Fig. 13. Calculated detectivity for p-on-n HgCdTe detector plotted versus operating temperature for four important wavelength regions
[14] Fig. 14. Dark current as a function of temperature and cutoff wavelengthfor HgCdTe focal plane detector
[7] Fig. 15. Main specifications of HOT HAWK MWIR focal plane detector operated at 155 K (a) and relationship of temperature with current density (b)
[15] Fig. 16. Relationship between operating temperature and cooling type of HgCdTe focal plane detector in MWIR, LWIR and VLWIR
[7] Fig. 17. Schematic illustration of HgCdTe APDs architecture
[16] Fig. 18. Schematic of the HDVIP structure HgCdTe APD of DRS Company
[19-20]. (a) Side view; (b) Top view
Fig. 19. Schematic of HgCdTe APDs by DRS using 2×8 HDVIP p-around-n cylindrical structure. (a) Top view; (b) Side view
[18] Fig. 20. DRS mini-Stirling cryocooler for the 2×8-pixel HgCdTe FPA
[18] Fig. 21. Measurement of the DRS HgCdTe APD responsivity(a) and NEP(b) as a function of the APD bias voltage
[18] Property
x | HgTe
0
| Hg1−xCdxTe
| CdTe
1.0
| 0.194 | 0.205 | 0.225 | 0.31 | 0.44 | 0.62 | a/Å
| 6.461 | 6.464 | 6.464 | 6.464 | 6.465 | 6.468 | 6.472 | 6.481 | | 77 K | 77 K | 77 K | 77 K | 140 K | 200 K | 250 K | 300 K | Eg/eV
| −0.261 | 0.073 | 0.091 | 0.123 | 0.272 | 0.474 | 0.749 | 1.490 | λc/μm
| — | 16.9 | 13.6 | 10.1 | 4.6 | 2.6 | 1.7 | 0.8 | ni/cm−3 | — | 1.9 × 1014 | 5.8 × 1 013 | 63 × 1012 | 3.7 × 1012 | 7.1 × 1011 | 3.1 × 1010 | 4.1 × 105 | mc/
m0 | — | 0.006 | 0.007 | 0.010 | 0.021 | 0.035 | 0.053 | 0.102 | gc | — | −150 | −118 | −84 | −33 | −15 | −7 | −1.2 | εs/ε0 | 20.0 | 18.2 | 18.1 | 17.9 | 17.1 | 15.9 | 14.2 | 10.6 | εs/ε0 | 14.4 | 12.8 | 12.7 | 12.5 | 11.9 | 10.8 | 9.3 | 6.2 | nr | 3.79 | 3.58 | 3.57 | 3.54 | 3.44 | 3.29 | 3.06 | 2.50 | μc/cm2·V−1·s−1 | — | 4.5 × 105 | 3.0 × 105 | 1.0 × 105 | — | — | — | — | μh/cm2·V−1·s−1 | — | 450 | 450 | 450 | — | | | — | b=μc/μ$_ \eta$ | — | 1 000 | 667 | 222 | — | — | — | | τR/μs | — | 16.5 | 13.9 | 10.4 | 11.3 | 11.2 | 10.6 | 2 | τAl/μs | — | 0.45 | 0.85 | 1.8 | 39.6 | 453 | 4.75 × 103 | | τtypical/μs | — | 0.4 | 0.8 | 1 | 7 | — | — | — | Ep/eV
| | | | 19 | | | | | $\Delta $/eV
| | | | 0.93 | | | | | mhh/m0 | | | | 0.40-0.53 | | | | $\Delta $/eV
| | | | 0.35-0.55 | | | |
|
Table 1. Important alloy compositions and physical parameters for Hg1−xCdxTe
| Bulk | Liquid phase epitaxy | Vapour phase epitaxy | SSR | Travelling heater method | HCT melt | Te melt | Hg melt | Te melt
| MOCVD | MBE | Temperature/℃ | 950 | 950 | 500 | 350-550 | 400-550 | 275-400 | 160-200 | Pressure/torr | 150 000 | 150 000 | 760-8 000 | 760-11 400 | 760-8 000 | 300-760 | 10−3-104 | Growth rate/μm·h−1 | 250 | 250 | 80 | 30-60 | 5-60 | 2-10 | 1-5 | Dimensions/cm | 0.8-1.2 dia | 0.8-1.2 dia | 2.5 dia | 5 | 5 | 7.5 dia | 7.5 dia | l/cm
| - | - | - | 6 | 5 | 4 | 4 | t/cm
| 15 | 15 | 5 | 0.000 2-0.003 0 | 0.000 5-0.012 | 0.000 5-0.001 | 0.000 5-0.001 | Dislocations/cm−2 | <105 | - | <105 | <105 | <105-107 | 5 × 105-5 ×107 | <5 × 104-5 ×106 | Purity/cm−3 | <5 × 1014 | <5 × 1014 | <5 × 1014 | <5 × 1014 | <5 × 1014 | <1× 1015 | <1 × 1015 | n-type doping/cm−3 | N/A | N/A | N/A | 1 × 1014-1 × 1018 | 1 × 1015-1 × 1016 | 5 × 1014-1 × 1018 | 5 × 1014-1 × 1019 | p-type doping/cm−3 | N/A | N/A | N/A | 1 × 1015-1 × 1018 | 1 × 1015-1 × 1016 | 3 × 1015-1 × 1017 | 5 × 1016-1 × 1018 | X-ray rocking curve/(") | - | - | 20-60 | <20 | <20 | 50-90 | 20-30 | Compositional uniformity (Δx)
| <0.002 | <0.004 | <0.005 | <0.002 | <0.002 | ±0.01-0.000 5 | ±0.01-0.000 6 |
|
Table 2. Comparison of the various methods used to grow HgCdTe, including bulk, LPE, MOCVD, and MBE
[5]