Design of microscope objective for laser scanning of MEMS galvanometer

Xingyu WANG; Zhaoqing YANG; Meng XUE; Hanming GUO

doi:10.3969/j.issn.1005-5630.2023.003.010

Journals >Optical Instruments >Volume 45 >Issue 3 >Page 74 > Article

Optical Instruments
Vol. 45, Issue 3, 74 (2023)

Design of microscope objective for laser scanning of MEMS galvanometer

Xingyu WANG¹, Zhaoqing YANG¹, Meng XUE¹, and Hanming GUO^1、2、*

Author Affiliations

¹School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China

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DOI: 10.3969/j.issn.1005-5630.2023.003.010 Cite this Article

Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74 Copy Citation Text

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Fig. 1. Optical scanning path

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Fig. 2. Initial structure of objective lens

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Fig. 3. Final structure of objective lens

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Fig. 4. Spot diagram of microscope objective

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Fig. 5. MTF curves

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Fig. 6. Field curves and distortion curves

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Fig. 7. Encircled energy distribution curves

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参数名称	指标
波段范围扫描角度（快轴）扫描频率（快轴）反射窗尺寸整体尺寸	400～1800 nm ±18° 29.3 kHz Ф1.23 mm 28.60 mm×20.42 mm

Table 1. Related parameters of MEMS galvanometer

参数	指标
入瞳直径像方视场角工作波段数值孔径分辨率物方半视场工作距最大外径总长	1.1 mm ±18° 800～860 nm 0.4 1.26 μm ＞0.4 mm ＞0.8 mm ＜5 mm ＜25 mm

Table 2. Objective design criteria

透镜组	初始结构曲率半径/mm	优化曲率半径/mm	优化结构材料
透镜组1		−62.26	H-ZF3
		−6.84	H-BAK7A
		3.01
透镜组2	−8.46	−70.40	H-ZF62
	7.55	−20.12	H-ZLAF90
	36.60	−5.75
透镜组3	91.85	−2.45	H-ZF3
	12.64	3.46	H-BAK7A
	−18.58	−3.31
透镜组4	15.83	10.03	D-FK61A
	−15.71	−2.36	H-ZF11
	93.06	14.76
透镜组5	15.40	15.48	H-LAK10
透镜组5	60.69	−4.09
透镜组6	13.76	13.96	H-QF8
	−15.72	4.03	H-ZLAF69
	61.41	60.11
透镜组7	5.36	2.11	H-ZLAF68C
	−8.21	7.35	ZF4
	707.26	1.82

Table 3. Data of lens

Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74

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