Design of microscope objective for laser scanning of MEMS galvanometer

Xingyu WANG; Zhaoqing YANG; Meng XUE; Hanming GUO

doi:10.3969/j.issn.1005-5630.2023.003.010

Journals >Optical Instruments >Volume 45 >Issue 3 >Page 74 > Article

Optical Instruments
Vol. 45, Issue 3, 74 (2023)

Design of microscope objective for laser scanning of MEMS galvanometer

Xingyu WANG¹, Zhaoqing YANG¹, Meng XUE¹, and Hanming GUO^1、2、*

Author Affiliations

¹School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China

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DOI: 10.3969/j.issn.1005-5630.2023.003.010 Cite this Article

Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74 Copy Citation Text

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Abstract

In order to meet the requirements of micro-electro-mechanical system (MEMS) two-dimensional laser scanning system for microscope objective with small entrance pupil diameter, large incident angle and large field of view, a near-infrared infinite conjugate microscope objective with an entrance pupil diameter of 1.1 mm and a large scanning angle of ± 18 ° is designed by using optical design software Zemax. The total length of the objective lens is less than 23 mm. The numerical aperture reaches 0.4 and the resolution is 1.26 μm. The working distance is 900 μm. The aberration correction is good.The designed microscope objective can meet the needs of use. The results show that the microscope objective can meet the requirements of MEMS two-dimensional galvanometer laser scanning system for portable skin detection instruments.

Keywords

large field of view MEMS galvanometer microscope objective near infrared optical design

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Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74

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