• Journal of Inorganic Materials
  • Vol. 34, Issue 8, 867 (2019)
Rui-Wen GENG1, Xiao-Jing YANG1、*, Qi-Ming XIE2, Rui LI3, and Liang LUO1
Author Affiliations
  • 1Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, China
  • 2Kunming Institute of Physics, Kunming 650233, China
  • 3Faculty of Environmental Science and Engineering, Kunming University of Science and Technology, Kunming 650500, China
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    DOI: 10.15541/jim20180500 Cite this Article
    Rui-Wen GENG, Xiao-Jing YANG, Qi-Ming XIE, Rui LI, Liang LUO. Material Removal Mechanism of Monocrystalline Germanium Based on Nano-scratch Experiment[J]. Journal of Inorganic Materials, 2019, 34(8): 867 Copy Citation Text show less
    Diagram of nano-scratch experiment
    1. Diagram of nano-scratch experiment
    Scratch morphology and its local amplification
    2. Scratch morphology and its local amplification
    Curves of scratch distance vs depth for monocrystalline germanium
    3. Curves of scratch distance vs depth for monocrystalline germanium
    AFM images of const load scratch
    4. AFM images of const load scratch
    Diagram of crack distribution for monocrystalline germanium
    5. Diagram of crack distribution for monocrystalline germanium
    Curves of scratch force vs distance
    6. Curves of scratch force vs distance
    Curves of scratch force vs depth for monocrystalline germanium
    7. Curves of scratch force vs depth for monocrystalline germanium
    Curve of elastic recovery rate during scratching
    8. Curve of elastic recovery rate during scratching
    Indenter-workpiece contract model in scratch process
    9. Indenter-workpiece contract model in scratch process
    Test parametersValue
    Scratch crystal plane(100)
    Scratch distance/μm500
    Scratch speed/(μm•s-1)5
    Load rate/(mN•μm-1)0.25
    Normal load range/mN0-125
    Const normal load/mN20/35/50
    Table 1. Nano-scratch test parameters
    RegimeLoad range/mNScratch distancerange/μm
    Ductile regime0-48100-298
    DBT regime48-100298-500
    Brittle regime100-125500-600
    Table 2. Load and scratch distance ranges for diffirent regimes
    Rui-Wen GENG, Xiao-Jing YANG, Qi-Ming XIE, Rui LI, Liang LUO. Material Removal Mechanism of Monocrystalline Germanium Based on Nano-scratch Experiment[J]. Journal of Inorganic Materials, 2019, 34(8): 867
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