Yanwei Li, Jingguo Zhang, Xinwang Xie, Taixi Chen, Leigang Dong. Design of Large-Aperture Rectangular SiC Scanning Mirror Assembly[J]. Laser & Optoelectronics Progress, 2022, 59(5): 0522001
- Laser & Optoelectronics Progress
- Vol. 59, Issue 5, 0522001 (2022)
Fig. 1. Working principle of the scanning mirror
Fig. 2. Lightweight layout of the scanning mirror
Fig. 3. Lightweight model of the scanning mirror
Fig. 4. Schematic diagram of components of the scanning mirror
Fig. 5. Principle of the ball joint flexible support mode
Fig. 6. Model of the ball joint support. (a) Three-dimensional model; (b) section view
Fig. 7. Structure of the ball joint
Fig. 8. Structure of the flexible hinge
Fig. 9. Model of the flexible hinge
Fig. 10. Finite element model of the scanning mirror
Fig. 11. Deformation figure of the ball hinge mode. (a) Y-direction gravity; (b) coupling of Y-direction gravity and uniform temperature rise at 40 ℃
Fig. 12. Dformation figure of the flexible hinge mode. (a) Y-direction gravity; (b) coupling of Y-direction gravity and uniform temperature rise at 40 ℃
Fig. 13. Vibration shape diagram of the ball hinge mode. (a) First mode; (b) second mode; (c) third mode
Fig. 14. Vibration shape diagram of the flexible hinge mode. (a) First mode; (b) second mode; (c) third mode
Fig. 15. Result of the surface inspection
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Table 1. Parameters of the scanning mirror
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Table 2. Material parameters in the scanning mirror
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Table 3. Key parameters of the flexible support
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Table 4. Surface shape analysis results of different structures
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Table 5. Natural frequencies of different structures
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