[1] Xiang Y C, Lin Y X, Ren Z Y. Study on surface defect detection method of optical element[J]. Optical Instruments, 40, 78-87(2018).
[2] Huang C, Zhang K P, Wang X et al. Method for surface quality inspection based on total scattering measurement[J]. Acta Optica Sinica, 39, 0712005(2019).
[3] Chu H Y. Research on surface defect detection technology of high power laser device optical components based on machine vision[D]. Chongqing: Chongqing University, 2-12(2011).
[4] Lu R S, Wu A, Zhang T D et al. Review on automated optical (visual) inspection and its applications in defect detection[J]. Acta Optica Sinica, 38, 0815002(2018).
[5] Yu W Y, Zhou Z D, Chen Y P. Machine vision system for on-line defect detection of float glass[J]. Journal of Huazhong University of Science and Technology (Nature Science Edition), 35, 1-4(2007).
[6] Liu Q X, Wang F, Wang Y C. Design of long depth of field array optical components defect detection system[J]. Acta Optica Sinica, 37, 0322002(2017).
[7] Jin Y, Wang Z, Chen Y X et al. The online measurement of optical distortion for glass defect based on the grating projection method[J]. Optik, 127, 2240-2245(2016).
[8] Jiang S, Yang L H, Ren Y J et al. Defect detection in mirror-like object surface based on phase deflection[J]. Laser & Optoelectronics Progress, 57, 031201(2020).
[9] Huang Y Y, Yue H M, Fang Y Y et al. Structured-light modulation analysis technique for contamination and defect detection of specular surfaces and transparent objects[J]. Optics Express, 27, 37721-37735(2019).
[10] Song Y P, Yue H M, Zhou Z et al. Detection of specular surface defects with eliminating dusts based on polarized structured-light illumination[J]. Proceedings of SPIE, 10839, 108391L(2019).
[11] Yue H M, Huang Y Y, Fang Y Y et al. -07-26(2019).
[12] Tao S W, Yue H M, Chen H L et al. Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry[J]. Results in Physics, 15, 102734(2019).
[13] Su L K, Su X Y, Li W S et al. Application of modulation measurement profilometry to objects with surface holes[J]. Applied Optics, 38, 1153-1158(1999).
