• Laser & Optoelectronics Progress
  • Vol. 54, Issue 4, 40004 (2017)
Chen Shanyong*, Lu Jinfeng, and Xue Shuai
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/lop54.040004 Cite this Article Set citation alerts
    Chen Shanyong, Lu Jinfeng, Xue Shuai. Variable Aberration Compensation Techniques in Wavefront Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(4): 40004 Copy Citation Text show less
    References

    [1] Wilson R N. Astronomical optics[M]. San Diego: Academic Press, 2000: 115-154.

    [2] Bociort F, Turnhout M V, Marinescu O E. Method of designing a projection system, lithographic apparatus and device manufacturing method: US, 7714307[P]. 2010-05-11.

    [3] Mann H J. Six-mirror EUV projection system with low incidence angles: US, 7973908[P]. 2011-07-05.

    [4] Wegner P, Auerbach J, Biesiada T, et al. NIF final optics system: frequency conversion and beam conditioning[C]. SPIE, 2004, 5341: 180-189.

    [6] Goodwin E P, Wyant J C. Field guide to interferometric optical testing[C]. SPIE, 2004, FG10: 114.

    [7] Faulde M, Fercher A F, Torge R, et al. Optical testing by means of synthetic holograms and partial lens compensation[J]. Optics Communications, 1973, 7(4): 363-365.

    [8] Liu Huilan, Hao Qun, Zhu Qiudong, et al. Testing an aspheric surface using part-compensating lens[J]. Transactions of Beijing Institute of Technology, 2004, 24(7): 625-628.

    [9] Meng Xiaochen, Hao Qun, Zhu Qiudong, et al. Optimization design of partially compensating lens based on Zemax[J]. Acta Optica Sinica, 2011, 31(6): 0622002.

    [10] Liu Dong, Yang Yongying, Tian Chao, et al. Partial null lens for general aspheric testing[J]. Infrared and Laser Engineering, 2009, 38(2): 322-325.

    [11] Luo Yongjie, Yang Yongying, Tian Chao, et al. Error analysis and processing of partial compensatory aspheric testing system[J]. Journal of Zhejiang University (Engineering Science), 2012, 46(4): 636-642.

    [12] Tian C, Yang Y Y, Zhuo Y M. Generalized data reduction approach for aspheric testing in a non-null interferometer[J]. Applied Optics, 2012, 51(10): 1598-1604.

    [13] Zhang L, Tian C, Liu D, et al. Non-null annular subaperture stitching interferometry for steep aspheric measurement[J]. Applied Optics, 2014, 53(25): 5755-5762.

    [15] Lowman A E. Calibration of a non-null interferometer for aspheric testing[D]. Tucson: University of Arizona, 1995.

    [16] Greivenkamp J E, Gappinger R O. Design of a non-null interferometer for aspheric wavefronts[J]. Applied Optics, 2004, 43(27): 5143-5151.

    [17] Sullivan J J, Greivenkamp J E. Design of partial nulls for testing of fast aspheric surfaces[C]. SPIE, 2007, 6671: 66710W.

    [19] Hilbert R S, Rimmer M P. A variable refractive null lens[J]. Applied Optics, 1970, 9(4): 849-852.

    [20] Palusinski I A, Sasián J M, Greivenkamp J E. Lateral-shift variable aberration generators[J]. Applied Optics, 1999, 38(1): 86-90.

    [21] Acosta E, Sasián J.Phase plates for generation of variable amounts of primary spherical aberration[J]. Optics Express, 2011, 19(14): 13171-13178.

    [22] Sasián J, Acosta E. Generation of spherical aberration with axially translating phase plates via extrinsic aberration[J]. Optics Express, 2014, 22(1): 289-294.

    [23] Lu J F, Chen S Y, Xue S. Variable aberration generator using a high-order even aspheric singlet for testing optical surfaces[C]. SPIE, 2016, 10155: 101550A.

    [24] Shi Zhonghua, Yang Baoxi, Wei Zhangfan, et al. Research progress in optical spacing measurement technology[J]. Laser & Optoelectronics Progress, 2015, 52(4): 040004.

    [25] Chen S Y, Zhao C Y, Dai Y F, et al. Reconfigurable optical null based on counterrotating Zernike plates for test of aspheres[J]. Optics Express, 2014, 22(2): 1381-1386.

    [26] Chen S Y, Li S Y, Dai Y F. Subaperture stitching interferometry: jigsaw puzzles in 3D space[M]. SPIE Press, 2016.

    [27] Chen S Y, Dai Y F, Li S Y, et al. Calculation of subaperture aspheric departure in lattice design for subaperture stitching interferometry[J]. Optical Engineering, 2010, 49(2): 023601.

    [28] Küchel M F. Interferometric measurement of rotationally symmetric aspheric surfaces[C]. SPIE, 2009, 7389: 738916.

    [29] Ostaszewski M, Harford S, Doughty N, et al. Risley prism beam pointer[C]. SPIE, 2006, 6304: 630406.

    [30] Yang Y G. Analytic solution of free space optical beam steering using risley prisms[J]. Journal of Lightwave Technology, 2008, 26(21): 3576-3583.

    [31] Jeon Y G. Generalization of the rst-order formula for analysis of scan patterns of Risley prisms[J]. Optical Engineering, 2011, 50(11): 113002.

    [32] Li Y J. Closed form analytical inverse solutions for Risley-prism-based beam steering systems in different configurations[J]. Applied Optics, 2011, 50(22): 4302-4309.

    [33] Li Y J. Third-order theory of the Risley-prism-based beam steering system[J]. Applied Optics, 2011, 50(5): 679-686.

    [34] QED Technologies announces ASITM metrology system for aspheres[EB/OL]. (2009-01-12). http://www.qedmrf.com.

    [35] Tricard M, Kulawiec A, Bauer M, et al. Subaperture stitching interferometry of high-departure aspheres by incorporating a variable optical null[J]. CIRP Annals - Manufacturing Technology, 2010, 59(1): 547-550.

    [36] Supranowitz C, McFee C, Murphy P. Asphere metrology using variable optical null technology[C]. SPIE, 2012, 8416: 841604.

    [37] Acosta E, Bará S. Variable aberration generators using rotated Zernike plates[J]. J Opt Soc Am A, 2005, 22(9): 1993-1996.

    [38] Song Bing, Chen Shanyong, Wang Guilin. Subaperture testing technique of aspheres based on counter-rotating phase plates[J]. Acta Optica Sinica, 2013, 33(11):1112007.

    [39] Evans C J, Küchel C G, Parks R E, et al. Adaptive nulls for testing off-axis segments of aspherics: US, 20060268282[P]. 2006-11-30.

    [40] Pruss C, Tiziani H J. Dynamic null lens for aspheric testing using a membrane mirror[J]. Optics Communications, 2004, 233(1-3): 15-19.

    [41] Lu Yacong, Chen Linsen, Wei Guojun, et al. Laser direct writing system of fabricating high resolution image with DMD[J]. Laser Journal, 2007, 28(6): 46-47.

    [42] Luo Ningning. Study on digital mask fabrication technique for micro-optical elements[D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2012: 12-13.

    [43] Collings N, Davey T, Christmas J, et al. The applications and technology of phase-only liquid crystal on silicon devices[J]. Journal of Display Technology, 2011, 7(3): 112-119.

    [44] Love G D. Wave-front correction and production of Zernike modes with a liquid-crystal spatial light modulator[J]. Applied Optics, 1997, 36(7): 1517-1524.

    [45] Hu L F, Xuan L, Liu Y J, et al. Phase-only liquid-crystal spatial light modulator for wave-front correction with high precision[J]. Optics Express, 2004, 12(26): 6403-6409.

    [46] Kacperski J, Kujawinska M. Active, LCoS based laser interferometer for microelements studies[J]. Optics Express, 2006, 14(21): 9664-9678.

    [47] Arines J, Durán V, Jaroszewicz Z, et al. Measurement and compensation of optical aberrations using a single spatial light modulator[J]. Optics Express, 2007, 15(23): 15287-15292.

    [48] Fernández E J, Prieto P M, Artal P.Wave-aberration control with a liquid crystal on silicon (LCOS) spatial phase modulator[J]. Optics Express, 2009, 17(13): 11013-11025.

    [49] Cao Z L, Xuan L, Hu L F, et al. Investigation of optical testing with a phase-only liquid crystal spatial light modulator[J]. Optics Express, 2005, 13(4): 1059-1065.

    [50] Ares M, Royo S, Sergievskaya I, et al. Active optics null test system based on a liquid crystal programmable spatial light modulator[J]. Applied Opitcs, 2010, 49(32): 6201-6206.

    [51] Jo J S, Trolinger J D, Lal A, et al. Practical issues in applying a programmable holographic optical element for optical metrology[C]. Mirror Technology SBIR/STTR Workshop, 2009.

    [52] Liu D, Shi T, Zhang L, et al. Reverse optimization reconstruction of aspheric figure error in a non-null interferometer[J]. Applied Optics, 2014, 53(24): 5538-5546.

    [53] Chen Xindong, Li Ruigang. Research on geometric parameter measurement method using laser tracker in null lens asphere testing[J]. Chinese J Lasers, 2015, 42(5): 0508007.

    [54] Quan Haiyang, Hou Xi, Wu Fan. Research status and progress of measurement uncertainty in interferometric testing of surface figure[J]. Laser & Optoelectronics Progress, 2015, 52(6): 060004.

    Chen Shanyong, Lu Jinfeng, Xue Shuai. Variable Aberration Compensation Techniques in Wavefront Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(4): 40004
    Download Citation