Yuan DONG, Qize ZHONG, Yongjian ZHENG, Shaonan ZHENG, Ting HU, Yuandong GU. Progress in Wafer-level Metasurface-based Flat Optics（Invited）[J]. Acta Photonica Sinica, 2021, 50(10): 1024002
- Acta Photonica Sinica
- Vol. 50, Issue 10, 1024002 (2021)
Fig. 1. Metasurface-based color display on a fabricated 12-inch Si wafer［38］. Adapted with permission from Ref.［38］© The Optical Society
Fig. 2. Metasurface-based polarizing bandpass filter on a fabricated 12-inch Si wafer［39］. Adapted with permission from Ref.［39］© The Optical Society
Fig. 3. Metasurface-based half-wave plate on a fabricated 12-inch Si wafer［40］. Adapted from Ref.［40］，© 2019 Zhengji Xu et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License
Fig. 4. Metalens fabricated on a 4-inch Si wafer［41］. Adapted with permission from Ref.［41］© The Optical Society
Fig. 5. Metalens fabricated on a 12-inch Si wafer［42］. © 2019 IEEE. Reprinted with permission from Ref.［42］
Fig. 6. Plasmonic perfect absorber fabricated on an 8-inch Si wafer［44］. Adapted from Ref.［44］. Under the Creative Commons Attribution 4.0 Public License
Fig. 7. Reflective［45］ and transmissive［46］ metalenses fabricated on quartz wafers. Adapted with permission from Refs.［45-46］© The Optical Society
Fig. 8. Transmissive metalenses fabricated in all quartz glass wafers. Adapted with permission from Ref.［47］© 2019 American Chemical Society
Fig. 10. Metalens fabricated on a 12-inch glass wafer by layer transfer technology［50］. Adapted from Ref.［50］，© 2020 Ting Hu et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License
Fig. 11. Metasurface deflector fabricated on a 12-inch glass wafer by layer transfer technology［51］. Adapted from Ref.［51］，© 2020 Nanxi Li et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License
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