Peng Wang, Hao Zhang, Yapeng Jia, Kun Yang, Weihao Li. Removal of the single point diamond turning marks by spiral sine trace bonnet polishing process[J]. Infrared and Laser Engineering, 2020, 49(7): 20200212
- Infrared and Laser Engineering
- Vol. 49, Issue 7, 20200212 (2020)
Fig. 1. Effect of polishing direction on rate of surface improvement
Fig. 2. Spiral sine polishing path
Fig. 3. Polishing trace comparison
Fig. 4. Micro-nano texture before and after polishing
Fig. 5. Comparison of the texture before and after polishing
Fig. 6. Compare of the PSD before and after polishing
Fig. 7. Comparison of the figure error before and after polishing
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Table 1. SPDT parameters for the samples
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Table 2. Bonnet polishing parameters
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Table 3. Parameters of different polishing trace
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Table 4. Parameters of aspheric test mirror
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