• Acta Optica Sinica
  • Vol. 33, Issue 4, 412002 (2013)
Xu Peng1,2,*, Liu Tao2, Wang Linzi2, Li Guoguang2..., Xiong Wei2 and Rong Jian1|Show fewer author(s)
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  • 2[in Chinese]
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    DOI: 10.3788/aos201333.0412002 Cite this Article Set citation alerts
    Xu Peng, Liu Tao, Wang Linzi, Li Guoguang, Xiong Wei, Rong Jian. Calibration Method for Single Wavelength Ellipsometry Using Standard Samples[J]. Acta Optica Sinica, 2013, 33(4): 412002 Copy Citation Text show less
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    [8] R. M. A. Azzam, N. M. Bashara. Ellipsometry and Polarized Light [M]. Amsterdam: North Holland Publishing Co., 1988, 166

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    CLP Journals

    [1] Song Guozhi, Liu Tao, Chen Yaqin, Li Guoguang, Wang Jiandong. Calibration of Spectroscopic Ellipsometer Using Multiple Standard Samples[J]. Acta Optica Sinica, 2014, 34(3): 312003

    [2] JIANG Chunguang, CHEN Yaqin, LIU Tao, XIONG Wei, LI Guoguang, JI Feng. All-reflective Broadband Spectroscopic Imaging Ellipsometer[J]. Opto-Electronic Engineering, 2016, 43(1): 55

    Xu Peng, Liu Tao, Wang Linzi, Li Guoguang, Xiong Wei, Rong Jian. Calibration Method for Single Wavelength Ellipsometry Using Standard Samples[J]. Acta Optica Sinica, 2013, 33(4): 412002
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