Rui Ge, Jiangwei Wu, Xiangmin Liu, Yuping Chen, Xianfeng Chen, "Recent progress in thin-film lithium niobate photonic crystal [Invited]," Chin. Opt. Lett. 22, 033602 (2024)

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- Chinese Optics Letters
- Vol. 22, Issue 3, 033602 (2024)

Fig. 1. Schematic of integrated LNPhC devices, including wavelength converter, sensor, modulator, opto-mechanical cavity, and superprism.
![Schematic of (a) TF-LNPhC on silica. Adapted with permission from [20]. (b) Suspended LNPhC. Adapted with permission from [22]. (c) APE LNPhC on common LN with lateral confinement. Adapted with permission from [15].](/richHtml/col/2024/22/3/033602/img_002.jpg)
Fig. 2. Schematic of (a) TF-LNPhC on silica. Adapted with permission from [20]. (b) Suspended LNPhC. Adapted with permission from [22]. (c) APE LNPhC on common LN with lateral confinement. Adapted with permission from [15].
![Schematic of the LNPhC fabricated by EBL with Ar+ etching. (a) 2D LNPhC cavity. Adapted with permission from [28]. (b) LNPhC cavity with ultra-high Q-factor. Adapted with permission from [29]. (c) LNPhC modulator. Adapted with permission from [30].](/Images/icon/loading.gif)
Fig. 3. Schematic of the LNPhC fabricated by EBL with Ar+ etching. (a) 2D LNPhC cavity. Adapted with permission from [28]. (b) LNPhC cavity with ultra-high Q-factor. Adapted with permission from [29]. (c) LNPhC modulator. Adapted with permission from [30].
![(a) Fabrication procedures of LNPhC based on the reactive ion etching and the IBEE technique. Adapted with permission from [10] and [25]. (b) Fabrication procedure of LNPhC based on redeposition-free FIB technique. Adapted with permission from [42]. (c) SEM image of holes fabricated by IBEE technique and redeposition-free FIB technique. Adapted with permission from [10] and [42].](/Images/icon/loading.gif)
Fig. 4. (a) Fabrication procedures of LNPhC based on the reactive ion etching and the IBEE technique. Adapted with permission from [10] and [25]. (b) Fabrication procedure of LNPhC based on redeposition-free FIB technique. Adapted with permission from [42]. (c) SEM image of holes fabricated by IBEE technique and redeposition-free FIB technique. Adapted with permission from [10] and [42].
![(a) Schematic and (b) SEM image of the etchless LNPhC with silica as the mask. Adapted with permission from [43]. (c) Schematic and (d) SEM image of the etchless LNPhC with polymer as the mask. Adapted with permission from [44].](/Images/icon/loading.gif)
Fig. 5. (a) Schematic and (b) SEM image of the etchless LNPhC with silica as the mask. Adapted with permission from [43]. (c) Schematic and (d) SEM image of the etchless LNPhC with polymer as the mask. Adapted with permission from [44].
![(a) Schematic of tapered fiber coupling. Adapted with permission from [28]. (b) End-face coupling. Adapted with permission from [15]. (c) Cross-polarized resonant scattering coupling. Adapted with permission from [38]. (d) Grating coupling. Adapted with permission from [34].](/Images/icon/loading.gif)
Fig. 6. (a) Schematic of tapered fiber coupling. Adapted with permission from [28]. (b) End-face coupling. Adapted with permission from [15]. (c) Cross-polarized resonant scattering coupling. Adapted with permission from [38]. (d) Grating coupling. Adapted with permission from [34].
![(a), (b) Optical microscopy images of two different mode-gap cavities. (c) Spectrum of the second-harmonic signal of the mode-gap cavity. (d) Second-harmonic power as a function of the fundamental pump wave power of the mode-gap cavity. Adapted with permission from [28]. (e) Second-harmonic power as a function of the fundamental pump wave power of the L3 cavity. Adapted with permission from [38]. (f) Second-harmonic power as a function of the fundamental pump wave of the bulk cavity made by redeposition-free FIB. Adapted with permission from [42].](/Images/icon/loading.gif)
Fig. 7. (a), (b) Optical microscopy images of two different mode-gap cavities. (c) Spectrum of the second-harmonic signal of the mode-gap cavity. (d) Second-harmonic power as a function of the fundamental pump wave power of the mode-gap cavity. Adapted with permission from [28]. (e) Second-harmonic power as a function of the fundamental pump wave power of the L3 cavity. Adapted with permission from [38]. (f) Second-harmonic power as a function of the fundamental pump wave of the bulk cavity made by redeposition-free FIB. Adapted with permission from [42].
![(a) Schematic of the LNPhC waveguide used for generating spectrally unentangled biphoton states. Mode profiles of pump, signal, and idler modes at the (b) z = 0 and (c) y = 0 planes. (d) Band diagram of the pump mode. (e) Band diagram of the signal and idler modes. (f) Bloch harmonic distribution of the modes. Adapted with permission from [68].](/Images/icon/loading.gif)
Fig. 8. (a) Schematic of the LNPhC waveguide used for generating spectrally unentangled biphoton states. Mode profiles of pump, signal, and idler modes at the (b) z = 0 and (c) y = 0 planes. (d) Band diagram of the pump mode. (e) Band diagram of the signal and idler modes. (f) Bloch harmonic distribution of the modes. Adapted with permission from [68].
![(a) SEM image, (b) experimental setup, and (c) results for Fano resonance-based LNPhC sensor. Adapted with permission from [75]. (d) Simulated transmission of the BIC LNPhC sensor. Adapted with permission from [80].](/Images/icon/loading.gif)
Fig. 9. (a) SEM image, (b) experimental setup, and (c) results for Fano resonance-based LNPhC sensor. Adapted with permission from [75]. (d) Simulated transmission of the BIC LNPhC sensor. Adapted with permission from [80].
![(a) Structure and (b) SEM image and enlarged SEM image of the mode-gap LNPhC modulator. (c) Eye diagrams of the electro-optic switch. Adapted with permission from [30].](/Images/icon/loading.gif)
Fig. 10. (a) Structure and (b) SEM image and enlarged SEM image of the mode-gap LNPhC modulator. (c) Eye diagrams of the electro-optic switch. Adapted with permission from [30].
![(a) SEM image of suspended LNPhC nanobeam and (b) observed mechanical lasing. Adapted with permission from [31]. (c) SEM image of the LNPhC transducer. Adapted with permission from [33]. (d) Transmission spectrum and power spectral density change for the mechanical mode. Adapted with permission from [54].](/Images/icon/loading.gif)
Fig. 11. (a) SEM image of suspended LNPhC nanobeam and (b) observed mechanical lasing. Adapted with permission from [31]. (c) SEM image of the LNPhC transducer. Adapted with permission from [33]. (d) Transmission spectrum and power spectral density change for the mechanical mode. Adapted with permission from [54].
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Table 1. Q -Factors of the Recent Works Based on the TF-LNPhC Cavity
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Table 2. Performance Parameters of the Modulator Based on the TF-LNPhCa
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Table 3. Optomechanic Properties of the LNPhC Nanobeam for Some State-of-the-Art Experimental Works
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Table 4. Comparison of Different Fabrication Processes of TF-LNPhC

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