• Laser & Optoelectronics Progress
  • Vol. 53, Issue 11, 112501 (2016)
Li Jingnan1、2、*, Bao Aida1、2, and Qin Li1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop53.112501 Cite this Article Set citation alerts
    Li Jingnan, Bao Aida, Qin Li. Laser Power Measurement Method Based on High Performance Black Silicon MEMS Thermopile Power Meter[J]. Laser & Optoelectronics Progress, 2016, 53(11): 112501 Copy Citation Text show less
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    [9] Lei C, Mao H Y, Ou W, et al. A CMOS-MEMS IR device based on double-layer thermocouples[J]. Microsystem Technologies, 2016, 22(5): 1203-1201.

    [10] Mao Haiyang, Ou Wen. High performance MEMS thermopile infrared detector based on black silicon and preparation method of manufacturing same: CN102829880A[P]. 2012-12-20.

    [11] Yao Lei, Hao Yueguo, Li Tie, et al. A low noise CMOS interface circuit for monolithic MEMS infrared sensor[J]. Chinese Journal of Sensors and Actuators, 2007, 20(10): 2203-2206.

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    Li Jingnan, Bao Aida, Qin Li. Laser Power Measurement Method Based on High Performance Black Silicon MEMS Thermopile Power Meter[J]. Laser & Optoelectronics Progress, 2016, 53(11): 112501
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