Author Affiliations
1School of Information Science and Engineering, Shandong University, Qingdao, Shandong 266237, China2Shandong Provincial Key Laboratory of Laser Technologies and Applications, Qingdao, Shandong 266237, China3State Key Laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Taiyuan, Shanxi 0 30006, Chinashow less
Fig. 1. Schematic diagram of Kerr lens mode-locked cavity
[25]. (a) Bow-tie ring cavity; (b) proposed compact linear cavity structure
Fig. 2. Schematic diagram of 3.5 GHz laser repetition rate multiplier
[29] Fig. 3. Schematic diagram of fiber ring cavity filter device with dispersion compensation
[31] Fig. 4. Schematic of active fiber loop
[33] Fig. 5. Schematic of pulse trains envelope shaping in active fiber loop
[33] Fig. 6. Schematic diagram of GHz NIR and GHz DUV laser generation
Fig. 7. Schematic of 3 GHz 257 nm DUV laser
[90] Fig. 8. Schematic of 14 W 266 nm DUV laser
[94] Fig. 9. Schematic diagram of 20 W 258 nm DUV laser
[93] Fig. 10. Schematic diagram of GHz 258 nm DUV laser
[98] Fig. 11. Current status of DUV lasers at 258 nm and 266 nm (repetition rate-energy)
Fig. 12. Current status of DUV lasers at 258 nm and 266 nm (repetition rate-average power)
Fig. 13. Schematic diagram for principle of FiHG “1+4”. o light is ordinary light, e light is extraordinary light
Fig. 14. Schematic diagram for principle of FiHG “2+3”. o light is ordinary light, e light is extraordinary light and DWWP is dual wavelength wave plate
Fig. 15. Current status of DUV lasers at 206 nm and 213 nm (repetition rate-energy)
Fig. 16. Current status of DUV lasers at 206 nm and 213 nm (repetition rate-average power)
Fig. 17. Schematic diagram of 2.5 W 206 nm DUV laser
[115] Fig. 18. Characterization of 2.5 W 206 nm DUV laser sum-frequency generation output at 2 W average power
[115]. (a) Cross-correlation signal of 4ω and 1ω beams; (b) output power versus crystal angle
θ-offset; (c) spectrum of output laser
Fig. 19. Schematic diagram of 1.37 W 213 nm DUV laser
[116] Fig. 20. Schematic diagram of 1.1 GHz 208.8 nm DUV laser
[118] Fig. 21. Schematic diagram of 1 W 193 nm DUV laser
[129] Year | Wavelength /nm | Pulse width | Output power /W | Repetition rate /GHz | Ref. No. |
---|
2010 | 1050 | 180 fs | 20 | 1.30 | [44] | 2011 | 1050 | 130 fs | 5 | 1.6 | [45] | 2012 | 1040 | 890 fs | 110 | 1.3 | [46] | 2014 | 1050 | 300fs | 72 | 1.6 | [47] | 2018 | 1030 | 800 fs-2ps | 20 | 1-18 | [48] | 2018 | 1030 | / | 100 | 1.76 | [49] | 2019 | 1030 | 480 fs | 100 | 0.87 | [50] | 2020 | 1057 | 473 fs | 108 | 1.2 | [51] | 2020 | 1057 | 868 fs | 130 | 1.2 | [42] | 2020 | 1030 | 310 fs | 100 | 3.52 | [30] | 2020 | 1030 | 233 fs | 97 | 1.08 | [36] |
|
Table 1. Research progresses of 1 μm band GHz repetition rate lasers
[30, 36, 42, 44-51] Crystal | LBO | BBO | CLBO | KABO | KBBF | RBBF |
---|
Lattice structure | orthorhombic system | trigonal system | tetragonal system | trigonal system | trigonal system | trigonal system | Space group | Pna21 | R3C | / | P321 | R32 | R32 | Point group | mm2 | / | / | / | / | / | Lattice constant /(10-10 m) | | | | | | | Unit numbers in cell | z=2 | z=6 | z=4 | / | / | / | Melting point /℃ | 834 | 1095 | 844.5 | 1109 | 1030 | 1030 | Mohs hardness | 6 | 4 | 4 | 5.5-6.5 | 2.66 | 2.66 | Mass density /(g·cm-3) | 2.47 | 3.85 | 2.45 | 2.47 | 2.41 | 2.40 | Hygroscopicity | low | low | high | low | low | low | Wavelength range /nm | 160-2600 | 189-3500 | 180-2750 | 180-3600 | 155-3660 | 160-3550 |
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Table 2. Properties of common nonlinear optical crystals
[53-59] Year | Fundamental wavelength /nm | Fundamental power /W | Output wavelength /nm | Output power | Pulse width /ns | Repetition rate | Ref. No. |
---|
2000 | 532 | 106 | 266 | 20.5 W | 80 | 10 kHz | [60] | 2000 | 1064 | 01.22 | 266 | 63 mW | 32 | 12.5 kHz | [61] | 2001 | 532 | 40 | 266 | 12 W | 70 | 1 kHz | [62] | 2002 | 1064 | 7 | 266 | 2.1 W | 22 | 5 kHz | [63] | 2002 | 1064 | 00.32 | 266 | 69 mW | 00.97 | 3.7 kHz | [64] | 2002 | 1064 | 08.74 | 266 | 196 mW | 12 | 18 kHz | [65] | 2003 | 1547 | 3.1 | 258 | 800 mW | 1 | 200 kHz | [66] | 2003 | 532 | 200 | 266 | 40 W | 80 | 7 kHz | [67] | 2006 | 532 | 120 | 266 | 28.4 W | 80 | 10 kHz | [68] | 2009 | 1064 | 81 | 266 | 14.8 W | 10 | 100 kHz | [69] | 2009 | 1064 | 52 | 266 | 1.9 W | 120 | 7.5 kHz | [70] | 2009 | 1031 | 40 | 258 | 14 W | 1 | 5 MHz | [71] | 2010 | 1064 | 14.30 | 266 | 374 mW | 5 | 20 kHz | [72] | 2010 | 1064 | 2.4 | 266 | 289 mW | 59.80 | 20 kHz | [73] | 2011 | 1064 | 22 | 266 | 2.1 W | 100 | 5 kHz | [74] | 2011 | 1064 | 80 | 266 | 5.05 W | 22.50 | 65 kHz | [75] | 2012 | 1064 | 150 | 266 | 3 W | 10 | 10 kHz | [76] | 2013 | 1064 | 18.80 | 266 | 1.82 W | 16 | 30 kHz | [77] | 2013 | 1030 | 22 | 258 | 3.2 W | 15 | 30 kHz | [78] | 2016 | 1064 | 24.50 | 266 | 3.3 W | 1.5 | 1 MHz | [79] | 2016 | 1064 | 10 | 266 | 1.85 W | 1.7 | 20 kHz | [80] | 2016 | 1030 | 3.6 | 258 | 1.1 W | 2.5 | 14.5 kHz | [81] | 2017 | 1030 | 35 | 258 | 10.5 W | 3 | 10 kHz | [82] |
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Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers
[60-82] Year | Fundamental wavelength /nm | Fundamental power /W | Output wavelength /nm | Output power | Pulse width /ps | Repetition rate | Ref. No. |
---|
2000 | 1064 | 27.4 | 266 | 4.5 W | 7 | 82 MHz | [83] | 2011 | 1064 | 22 | 266 | 0.93 W | 25 | 78 MHz | [84] | 2013 | 1064 | 15 | 266 | 4.5 W | 72 | 100 kHz | [85] | 2015 | 1030 | 27.4 | 258 | 2.74 W | 8.4 | 1 kHz | [86] | 2015 | 1064 | 20 | 266 | 2.9 W | 20 | 80 MHz | [87] | 2016 | 1030 | 60 | 258 | 6 W | 4 | 100 kHz | [88] | 2018 | 1064 | 34 | 266 | 1.6 W | 25 | 80 MHz | [89] | 2018 | 1030 | 10 | 257 | 3 mW | 1.8 | 3 GHz | [90] | 2019 | 1030 | 33 | 258 | 7.6 W | 1.5 | 77 kHz | [91] | 2019 | 1064 | 260 | 266 | 50.1 W | 15 | 1 MHz | [92] | 2020 | 1030 | 270 | 258 | 20 W | 1.2 | 10 kHz | [93] | 2020 | 1064 | / | 266 | 14 W | 13 | 200 kHz | [94] |
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Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers
[83-94] Year | Fundamental wavelength /nm | Fundamental power /W | Output wavelength /nm | Output power | Pulse width /fs | Repetition rate | Ref. No. |
---|
2010 | 1030 | 11.5 | 259 | 1 W | 262 | 100 MHz | [95] | 2017 | 1030 | 40 | 258 | 4.6 W | 150 | 796 kHz | [96] | 2019 | 1064 | 04.8 | 266 | 616 mW | 260 | 78 MHz | [97] | 2020 | 1030 | 10.4 | 258 | 523 mW | 500 | 11.48 GHz | [98] |
|
Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers
[95-98] Year | Fundamental wavelength /nm | Fundamental power /W | Output wavelength /nm | Output power | Pulse width | Repetition rate | Ref. No. |
---|
1979 | 1064 | 2.5 | 213 | 2 mW | 80 ns | 4 kHz | [99] | 1995 | 1064 | 6 | 213 | 400 mW | 37 ns | 7 kHz | [100] | 1995 | 1064 | 4 | 213 | 31 mW | 20 ns | 20 kHz | [101] | 1996 | 1064 | 10 | 213 | 560 mW | 1.5 ns | 200 Hz | [102] | 1996 | 1064 | 22 | 213 | 2.3 W | 7 ns | 10 Hz | [103] | 1997 | 1064 | 47 | 213 | 4 W | 3 ns | 100 Hz | [104] | 1997 | 1064 | 6.4 | 213 | 0.5 W | 17.9 ns | 7 kHz | [105] | 1998 | 1064 | 02.13 | 213 | 100 mW | / | 1 kHz | [106] | 1999 | 1064 | 4 | 213 | 75 mW | 7 ns | 10 Hz | [107] | 1999 | 1064 | 1 | 213 | 115mW | / | 5 Hz | [108] | 1999 | 1064 | 4 | 213 | 280 mW | 1.8 ns | 20 Hz | [108] | 2000 | 1064 | 27.40 | 213 | 1.15 W | 7 ps | 82 MHz | [83] | 2002 | 1064 | 7 | 213 | 540 mW | / | 5 kHz | [63] | 2002 | 1064 | 00.32 | 213 | 18 mW | / | 3.7 kHz | [64] | 2003 | 1064 | 7 | 213 | 2 W | / | 5 kHz | [109] | 2003 | 1047 | 15 | 205 | 250 mW | / | 100 MHz | [110] | 2005 | 1064 | 7 | 213 | 0.7 W | 7 ns | 20 Hz | [111] | 2007 | 1064 | 395 | 213 | 10.2 W | / | 10 kHz | [112] | 2015 | 1064 | / | 213 | 100 mW | 15 ns | 30 kHz | [113] | 2016 | 1030 | 60 | 206 | 0.8 W | 4 ps | 100 kHz | [88] | 2019 | 1064 | 24 | 213 | 0.5 W | 40 ps | 120 MHz | [114] | 2019 | 1030 | 80 | 206 | 1 W | 1.5 ps | 77 kHz | [91] | 2020 | 1030 | 65 | 206 | 2.5 W | 1.6 ps | 100 kHz | [115] | 2020 | 1064 | 30 | 213 | 1.37 W | 17 ps | 1 MHz | [116] | 2020 | 1064 | 10.50 | 213 | 61 mW | 690 ps | 5 MHz | [117] |
|
Table 6. Research progress of 206 nm and 213 nm DUV lasers
[63-64, 83, 88, 91, 99-117] Year | Pump wavelength (NIR) /nm | Pump wavelength (DUV) /nm | Output power | Pulse width | Repetition rate | Ref. No. |
---|
1994 | 774 | 258 | 0.8 mW | 170 fs | 1 kHz | [125] | 2003 | 1547 | 221 | 140 mW | 1 ns | 200 kHz | [66] | 2003 | 2074 | 213 | 3 mW | 3.5 ns | 4 Hz | [126] | 2003 | 1064 | 235.8 | 200 mW | / | 10 kHz | [127] | 2007 | 708.6 | 266 | 35 mW | 15 ns | 5 kHz | [128] | 2011 | 1107 | 234.3 | 11.6 mW | / | CW | [129] | 2014 | 1342 | 224 | 240 mW | 12.2 ns | 10 kHz | [130] | 2015 | 1553 | 221 | 310 mW | 10 ns | 6 kHz | [131] | 2017 | 1553 | 221 | 1.02 W | 3 ns | 10 kHz | [132] |
|
Table 7. Research progress of 193 nm DUV lasers
[66, 125-132]