Xiaodong WANG, Chaomin WANG, Zhihong FU, Jie WANG. Research on Technology to Enhance the Quantum Efficiency in Ultraviolet Spectral Range of CCD[J]. Optoelectronic Technology, 2020, 40(3): 195
- Optoelectronic Technology
- Vol. 40, Issue 3, 195 (2020)
Fig. 1. Photo⁃sensitive region structure of traditional CCD
Fig. 2. Transmittance curves of different silicon nitride thicknesses
Fig. 3. Transmittance curves of different silicon oxide thicknesses
Fig. 4. Linear CCD response without HAD structure
Fig. 5. Linear CCD response with HAD structure
Fig. 6. Results of ion-implant with different dose and energy
Fig. 7. Results of ion-implant after optimizing the energy and dose
Fig. 8. SEM pictures before and after silicon nitride etching
Fig. 9. Result of optimization of silicon nitride etching
Fig. 10. The photo of ultraviolet linear CCD
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Table 1. 波长300 nm~400 nm范围内不同厚度膜层的平均透射率
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Table 2. 硅衬底材料对不同波长光子吸收特性
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